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Carbon nanotube vias fabricated by remote plasma-enhanced chemical vapor deposition
Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki, Tadashi Sakai, Shintaro Sato, Takashi Hyakushima, Mizuhisa Nihei, Yuji Awano
Research output: Contribution to journal › Article
22
Citations
(Scopus)