Carbon nanotube vias fabricated by remote plasma-enhanced chemical vapor deposition

Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki, Tadashi Sakai, Shintaro Sato, Takashi Hyakushima, Mizuhisa Nihei, Yuji Awano

Research output: Contribution to journalArticle

22 Citations (Scopus)

Fingerprint Dive into the research topics of 'Carbon nanotube vias fabricated by remote plasma-enhanced chemical vapor deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy