Carbon nanotube vias for multilevel interconnects using CMP techniques

Mizuhisa Nihei, Akio Kawabata, Shintaro Sato, Daiyu Kondo, Masahiro Horibe, Hiroki Shioya, Taisuke Iwai, Yuji Awano

Research output: Contribution to conferencePaperpeer-review

Fingerprint Dive into the research topics of 'Carbon nanotube vias for multilevel interconnects using CMP techniques'. Together they form a unique fingerprint.

Engineering & Materials Science