Catalyst-free growth of high-quality ZnO nanorods on Si(100) substrate by two-step, off-axis pulsed-laser deposition

Ryo Nishimura, Tatsunori Sakano, Takeshi Okato, Toshiharu Saiki, Minoru Obara

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

We demonstrate the growth of ZnO nanorods on a Si(100) substrate through a two-step process, annealing and off-axis pulsed laser deposition (PLD), without a catalyst. ZnO powder was first dispersed on the Si substrate, and annealed to form seeds for ZnO nanorod growth for 2.5 h. In the second step, ZnO was deposited on the seeds by PLD for 1 h. It was experimentally confirmed that the surface morphology after annealing acts as growth nuclei of nanorods. Controlling growth parameters during deposition enables the adjustment of the sizes of nanorods, namely, diameter and length. The diameters of the grown nanorods are 50-700nm and the lengths are 2-10μm. Cathode luminescence (CL) spectra were used to evaluate the states of defects within the ZnO nanorods. According to the CL measurement results, the thinnest nanorod arrays were found to have fewer detects, and more detects were introduced as nanorods became thicker.

Original languageEnglish
Pages (from-to)4799-4802
Number of pages4
JournalJapanese Journal of Applied Physics
Volume47
Issue number6 PART 1
DOIs
Publication statusPublished - 2008 Jun 13

Fingerprint

Pulsed laser deposition
Nanorods
nanorods
pulsed laser deposition
catalysts
Catalysts
Substrates
Seed
Luminescence
seeds
Cathodes
cathodes
Annealing
luminescence
annealing
Surface morphology
adjusting
Powders
Defects
nuclei

Keywords

  • Annealing
  • Catalyst-free
  • Nanorod
  • Off-axis pulsed-laser deposition
  • Zinc oxide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Catalyst-free growth of high-quality ZnO nanorods on Si(100) substrate by two-step, off-axis pulsed-laser deposition. / Nishimura, Ryo; Sakano, Tatsunori; Okato, Takeshi; Saiki, Toshiharu; Obara, Minoru.

In: Japanese Journal of Applied Physics, Vol. 47, No. 6 PART 1, 13.06.2008, p. 4799-4802.

Research output: Contribution to journalArticle

Nishimura, Ryo ; Sakano, Tatsunori ; Okato, Takeshi ; Saiki, Toshiharu ; Obara, Minoru. / Catalyst-free growth of high-quality ZnO nanorods on Si(100) substrate by two-step, off-axis pulsed-laser deposition. In: Japanese Journal of Applied Physics. 2008 ; Vol. 47, No. 6 PART 1. pp. 4799-4802.
@article{3431e8dae67f4b22a3d75021bfd723f1,
title = "Catalyst-free growth of high-quality ZnO nanorods on Si(100) substrate by two-step, off-axis pulsed-laser deposition",
abstract = "We demonstrate the growth of ZnO nanorods on a Si(100) substrate through a two-step process, annealing and off-axis pulsed laser deposition (PLD), without a catalyst. ZnO powder was first dispersed on the Si substrate, and annealed to form seeds for ZnO nanorod growth for 2.5 h. In the second step, ZnO was deposited on the seeds by PLD for 1 h. It was experimentally confirmed that the surface morphology after annealing acts as growth nuclei of nanorods. Controlling growth parameters during deposition enables the adjustment of the sizes of nanorods, namely, diameter and length. The diameters of the grown nanorods are 50-700nm and the lengths are 2-10μm. Cathode luminescence (CL) spectra were used to evaluate the states of defects within the ZnO nanorods. According to the CL measurement results, the thinnest nanorod arrays were found to have fewer detects, and more detects were introduced as nanorods became thicker.",
keywords = "Annealing, Catalyst-free, Nanorod, Off-axis pulsed-laser deposition, Zinc oxide",
author = "Ryo Nishimura and Tatsunori Sakano and Takeshi Okato and Toshiharu Saiki and Minoru Obara",
year = "2008",
month = "6",
day = "13",
doi = "10.1143/JJAP.47.4799",
language = "English",
volume = "47",
pages = "4799--4802",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "6 PART 1",

}

TY - JOUR

T1 - Catalyst-free growth of high-quality ZnO nanorods on Si(100) substrate by two-step, off-axis pulsed-laser deposition

AU - Nishimura, Ryo

AU - Sakano, Tatsunori

AU - Okato, Takeshi

AU - Saiki, Toshiharu

AU - Obara, Minoru

PY - 2008/6/13

Y1 - 2008/6/13

N2 - We demonstrate the growth of ZnO nanorods on a Si(100) substrate through a two-step process, annealing and off-axis pulsed laser deposition (PLD), without a catalyst. ZnO powder was first dispersed on the Si substrate, and annealed to form seeds for ZnO nanorod growth for 2.5 h. In the second step, ZnO was deposited on the seeds by PLD for 1 h. It was experimentally confirmed that the surface morphology after annealing acts as growth nuclei of nanorods. Controlling growth parameters during deposition enables the adjustment of the sizes of nanorods, namely, diameter and length. The diameters of the grown nanorods are 50-700nm and the lengths are 2-10μm. Cathode luminescence (CL) spectra were used to evaluate the states of defects within the ZnO nanorods. According to the CL measurement results, the thinnest nanorod arrays were found to have fewer detects, and more detects were introduced as nanorods became thicker.

AB - We demonstrate the growth of ZnO nanorods on a Si(100) substrate through a two-step process, annealing and off-axis pulsed laser deposition (PLD), without a catalyst. ZnO powder was first dispersed on the Si substrate, and annealed to form seeds for ZnO nanorod growth for 2.5 h. In the second step, ZnO was deposited on the seeds by PLD for 1 h. It was experimentally confirmed that the surface morphology after annealing acts as growth nuclei of nanorods. Controlling growth parameters during deposition enables the adjustment of the sizes of nanorods, namely, diameter and length. The diameters of the grown nanorods are 50-700nm and the lengths are 2-10μm. Cathode luminescence (CL) spectra were used to evaluate the states of defects within the ZnO nanorods. According to the CL measurement results, the thinnest nanorod arrays were found to have fewer detects, and more detects were introduced as nanorods became thicker.

KW - Annealing

KW - Catalyst-free

KW - Nanorod

KW - Off-axis pulsed-laser deposition

KW - Zinc oxide

UR - http://www.scopus.com/inward/record.url?scp=55049140571&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=55049140571&partnerID=8YFLogxK

U2 - 10.1143/JJAP.47.4799

DO - 10.1143/JJAP.47.4799

M3 - Article

VL - 47

SP - 4799

EP - 4802

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6 PART 1

ER -