Catalyst-free growth of high-quality ZnO nanorods on Si(100) substrate by two-step, off-axis pulsed-laser deposition

Ryo Nishimura, Tatsunori Sakano, Takeshi Okato, Toshiharu Saiki, Minoru Obara

    Research output: Contribution to journalArticlepeer-review

    22 Citations (Scopus)

    Abstract

    We demonstrate the growth of ZnO nanorods on a Si(100) substrate through a two-step process, annealing and off-axis pulsed laser deposition (PLD), without a catalyst. ZnO powder was first dispersed on the Si substrate, and annealed to form seeds for ZnO nanorod growth for 2.5 h. In the second step, ZnO was deposited on the seeds by PLD for 1 h. It was experimentally confirmed that the surface morphology after annealing acts as growth nuclei of nanorods. Controlling growth parameters during deposition enables the adjustment of the sizes of nanorods, namely, diameter and length. The diameters of the grown nanorods are 50-700nm and the lengths are 2-10μm. Cathode luminescence (CL) spectra were used to evaluate the states of defects within the ZnO nanorods. According to the CL measurement results, the thinnest nanorod arrays were found to have fewer detects, and more detects were introduced as nanorods became thicker.

    Original languageEnglish
    Pages (from-to)4799-4802
    Number of pages4
    JournalJapanese journal of applied physics
    Volume47
    Issue number6 PART 1
    DOIs
    Publication statusPublished - 2008 Jun 13

    Keywords

    • Annealing
    • Catalyst-free
    • Nanorod
    • Off-axis pulsed-laser deposition
    • Zinc oxide

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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