TY - JOUR
T1 - Centrifugal and hydroplaning phenomena in high-speed polishing
AU - Zhu, Wu Le
AU - Ben Achour, Soufian
AU - Beaucamp, Anthony
N1 - Funding Information:
This work was supported by the Grant-in-Aid for Scientific Research No. 17K14571 from the Japan Society for Promotion of Science , and the grant program for research and development from the Mazak foundation . The authors acknowledge support from Zeeko Ltd. for loaning the bonnet polishing system.
Publisher Copyright:
© 2019
PY - 2019
Y1 - 2019
N2 - Super fine polishing with compliant tools can achieve nanoscale roughness, but has limited productivity due to low material removal rate (MRR). Increased spindle speed in high-speed polishing (HSP) might increase MRR, but significant challenges appear above 10,000 rpm because of centrifugal deformation of the tool and pad lifting due to hydroplaning phenomenon. Here, a tool offset compensation strategy is proposed for centrifugal deformation and novel pad patterning design that mitigates hydroplaning. Through this new approach, linear increase in MRR for spindle speed up to 24,000 rpm is demonstrated. This work lays the foundation for future developments of HSP in fabrication of ultraprecision optics.
AB - Super fine polishing with compliant tools can achieve nanoscale roughness, but has limited productivity due to low material removal rate (MRR). Increased spindle speed in high-speed polishing (HSP) might increase MRR, but significant challenges appear above 10,000 rpm because of centrifugal deformation of the tool and pad lifting due to hydroplaning phenomenon. Here, a tool offset compensation strategy is proposed for centrifugal deformation and novel pad patterning design that mitigates hydroplaning. Through this new approach, linear increase in MRR for spindle speed up to 24,000 rpm is demonstrated. This work lays the foundation for future developments of HSP in fabrication of ultraprecision optics.
KW - High-speed polishing
KW - Material removal
KW - Ultra precision
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U2 - 10.1016/j.cirp.2019.04.018
DO - 10.1016/j.cirp.2019.04.018
M3 - Article
AN - SCOPUS:85064653783
SN - 0007-8506
VL - 68
SP - 369
EP - 372
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -