Abstract
We investigated the characteristics of microfluidic devices fabricated using photosensitive sheets adhered to substrates. We evaluated them in regard to practical criteria, namely chemical resistance, pressure sealing, electrical resistance and elution of ions. No samples exhibited peeling after postbaking when we investigated the adhesion characteristics by dicing. The sheet swelled dramatically on exposure to an alkaline solution. The microfluidic devices consisting of photosensitive sheet sandwiched by two Pyrex substrates and a photosensitive sheet sandwiched by two PMMA substrates had a pressure sealing of 0.6 MPa, were capable of withstanding a pressure of 0.2 MPa for 1 h when ultrapure water was injected. The sheets had a high volume resistivity (9.7 × 1012 Ω cm) and a high surface resistivity (2.3 × 1011 Ω) after postbaking. Sodium ions were adsorbed onto the photosensitive sheet and then gradually desorbed. The total amount of sodium ion elution per unit area over 24 h was 8.3 × 10-9 mol mm -2 as measured by ion exchange chromatography. These results confirm that microfluidic devices fabricated using photosensitive sheets are suitable for use as disposable devices for certain applications.
| Original language | English |
|---|---|
| Article number | 003 |
| Pages (from-to) | 432-438 |
| Number of pages | 7 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 17 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2007 Mar 1 |
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ASJC Scopus subject areas
- Instrumentation
- Materials Science(all)
- Mechanics of Materials
- Computational Mechanics
Cite this
Characterization of a microfluidic device fabricated using a photosensitive sheet. / Ito, Takeshi; Kawaguchi, Taku; Miyoshi, Hiroko; Maruyama, Kenichi; Kaneko, Satoru; Ohya, Seishiro; Iwasaki, Yuzuru; Niwa, Osamu; Suzuki, Koji.
In: Journal of Micromechanics and Microengineering, Vol. 17, No. 3, 003, 01.03.2007, p. 432-438.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Characterization of a microfluidic device fabricated using a photosensitive sheet
AU - Ito, Takeshi
AU - Kawaguchi, Taku
AU - Miyoshi, Hiroko
AU - Maruyama, Kenichi
AU - Kaneko, Satoru
AU - Ohya, Seishiro
AU - Iwasaki, Yuzuru
AU - Niwa, Osamu
AU - Suzuki, Koji
PY - 2007/3/1
Y1 - 2007/3/1
N2 - We investigated the characteristics of microfluidic devices fabricated using photosensitive sheets adhered to substrates. We evaluated them in regard to practical criteria, namely chemical resistance, pressure sealing, electrical resistance and elution of ions. No samples exhibited peeling after postbaking when we investigated the adhesion characteristics by dicing. The sheet swelled dramatically on exposure to an alkaline solution. The microfluidic devices consisting of photosensitive sheet sandwiched by two Pyrex substrates and a photosensitive sheet sandwiched by two PMMA substrates had a pressure sealing of 0.6 MPa, were capable of withstanding a pressure of 0.2 MPa for 1 h when ultrapure water was injected. The sheets had a high volume resistivity (9.7 × 1012 Ω cm) and a high surface resistivity (2.3 × 1011 Ω) after postbaking. Sodium ions were adsorbed onto the photosensitive sheet and then gradually desorbed. The total amount of sodium ion elution per unit area over 24 h was 8.3 × 10-9 mol mm -2 as measured by ion exchange chromatography. These results confirm that microfluidic devices fabricated using photosensitive sheets are suitable for use as disposable devices for certain applications.
AB - We investigated the characteristics of microfluidic devices fabricated using photosensitive sheets adhered to substrates. We evaluated them in regard to practical criteria, namely chemical resistance, pressure sealing, electrical resistance and elution of ions. No samples exhibited peeling after postbaking when we investigated the adhesion characteristics by dicing. The sheet swelled dramatically on exposure to an alkaline solution. The microfluidic devices consisting of photosensitive sheet sandwiched by two Pyrex substrates and a photosensitive sheet sandwiched by two PMMA substrates had a pressure sealing of 0.6 MPa, were capable of withstanding a pressure of 0.2 MPa for 1 h when ultrapure water was injected. The sheets had a high volume resistivity (9.7 × 1012 Ω cm) and a high surface resistivity (2.3 × 1011 Ω) after postbaking. Sodium ions were adsorbed onto the photosensitive sheet and then gradually desorbed. The total amount of sodium ion elution per unit area over 24 h was 8.3 × 10-9 mol mm -2 as measured by ion exchange chromatography. These results confirm that microfluidic devices fabricated using photosensitive sheets are suitable for use as disposable devices for certain applications.
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UR - http://www.scopus.com/inward/citedby.url?scp=34249037101&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/17/3/003
DO - 10.1088/0960-1317/17/3/003
M3 - Article
VL - 17
SP - 432
EP - 438
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 3
M1 - 003
ER -