@inproceedings{34971870dbe9450fbc3b66184206fb76,
title = "Characterization of fluid flows in 101 NM extended-nano spaces",
abstract = "We report measurements of mass flow rate for fluid flows in 101 nm channels in a transitional region between single molecules and continuum. We realized fabrication of square-shaped 101 nm channel with 100 nm roughness for the first time. The flow rate in the fabricated channels at sizes of 70-100 nm was successfully measured. This work provides a new research tool and greatly contributes to fields of nanofluidics and molecular fluid science.",
keywords = "Extended-nano space, Fabrication, Flow rate, Fluid science",
author = "Y. Kazoe and K. Ikeda and K. Morikawa and Y. Pihosh and K. Mawatari and T. Kitamori",
note = "Funding Information: This work was supported by a Grant-in-Aids for Young Researchers (A) from the Japan Society for the Promotion of Science (JSPS). Copyright: Copyright 2017 Elsevier B.V., All rights reserved.; 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016 ; Conference date: 09-10-2016 Through 13-10-2016",
year = "2016",
language = "English",
series = "20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016",
publisher = "Chemical and Biological Microsystems Society",
pages = "812--813",
booktitle = "20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016",
}