Chemical etching behavior of Pt-patterned (0001) and (000̄1) surfaces of ZnO

Maki Hideyuki, Ichinose Noboru, Ikoma Toshiyuki, Sakaguchi Isao, Ohashi Naoki, Haneda Hajime, Tanaka Junzo

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3 Citations (Scopus)


The chemical etching mechanism of ZnO (0001) and (000̄1) polar surfaces was experimentally investigated by a scanning electron microscope, and applied to the control of surface morphology. The (0001) and (000̄1) surfaces of ZnO single crystal were periodically patterned using Pt masks, and were etched in HCl solution for 1-6 d. The etched patterns could not exactly reflect the shape of the masks due to side etching on the (0001) surface. With respect to the (000̄1) surface, many hillocks periodically formed with keeping the original square shape. The difference in the etching behavior was caused by the difference in the uppermost surface structure. The (0001) surface was etched at step or kink sites because of the existence of oxygen ions at only the steps or kinks, and therefore the step flow etching occurs. However, the (000̄1) surface is etched not at steps and kinks but at the terraces in which only the oxygen ions exist, and the etching direction is vertical to the crystal surface. After long-duration etching, the pattern changed into a pointed pyramidal shape on the (000̄1) surface.

Original languageEnglish
Pages (from-to)395-397
Number of pages3
JournalJournal of the Ceramic Society of Japan
Issue number1281
Publication statusPublished - 2002 May
Externally publishedYes


  • Etching
  • Patterning
  • Polar surface
  • Single crystal
  • Surface structure
  • Zinc oxide

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry


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