Chemical etching behavior of Pt-patterned (0001) and (000̄1) surfaces of ZnO

Hideyuki Maki, Ichinose Noboru, Ikoma Toshiyuki, Sakaguchi Isao, Ohashi Naoki, Haneda Hajime, Tanaka Junzo

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The chemical etching mechanism of ZnO (0001) and (000̄1) polar surfaces was experimentally investigated by a scanning electron microscope, and applied to the control of surface morphology. The (0001) and (000̄1) surfaces of ZnO single crystal were periodically patterned using Pt masks, and were etched in HCl solution for 1-6 d. The etched patterns could not exactly reflect the shape of the masks due to side etching on the (0001) surface. With respect to the (000̄1) surface, many hillocks periodically formed with keeping the original square shape. The difference in the etching behavior was caused by the difference in the uppermost surface structure. The (0001) surface was etched at step or kink sites because of the existence of oxygen ions at only the steps or kinks, and therefore the step flow etching occurs. However, the (000̄1) surface is etched not at steps and kinks but at the terraces in which only the oxygen ions exist, and the etching direction is vertical to the crystal surface. After long-duration etching, the pattern changed into a pointed pyramidal shape on the (000̄1) surface.

Original languageEnglish
Pages (from-to)395-397
Number of pages3
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume110
Issue number1281
Publication statusPublished - 2002 May
Externally publishedYes

Fingerprint

Etching
etching
oxygen ions
Masks
masks
Ions
Oxygen
Surface structure
Surface morphology
crystal surfaces
Electron microscopes
Single crystals
electron microscopes
Scanning
Crystals
scanning
single crystals

Keywords

  • Etching
  • Patterning
  • Polar surface
  • Single crystal
  • Surface structure
  • Zinc oxide

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Chemical etching behavior of Pt-patterned (0001) and (000̄1) surfaces of ZnO. / Maki, Hideyuki; Noboru, Ichinose; Toshiyuki, Ikoma; Isao, Sakaguchi; Naoki, Ohashi; Hajime, Haneda; Junzo, Tanaka.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 110, No. 1281, 05.2002, p. 395-397.

Research output: Contribution to journalArticle

Maki, Hideyuki ; Noboru, Ichinose ; Toshiyuki, Ikoma ; Isao, Sakaguchi ; Naoki, Ohashi ; Hajime, Haneda ; Junzo, Tanaka. / Chemical etching behavior of Pt-patterned (0001) and (000̄1) surfaces of ZnO. In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan. 2002 ; Vol. 110, No. 1281. pp. 395-397.
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