Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive

Masaaki Hashimoto, Yoshihiro Taguchi

Research output: Contribution to journalArticle

Abstract

This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner with a millimeter-range low-power lens drive for endoscopic biomedical applications. A variation of Japanese origami art, kirigami involves creation of out-of-plane structures by paper cutting and folding. The proposed microscanner is composed of freestanding kirigami film on which the spiral-curved thermal bimorphs are strategically placed. The kirigami microscanner is electrothermally transformed into an out-of-plane circular multistep pyramid by Joule heating. The circular pyramidal kirigami microscanner on a small footprint of 4.5 mm 4.5 mm was fabricated by microelectromechanical system processes. A large four-step pyramidal actuation was successfully demonstrated, and a large 1.1-mm lens travel range at only 128 mW was achieved.

Original languageEnglish
Pages (from-to)17457-17467
Number of pages11
JournalOptics Express
Volume28
Issue number12
DOIs
Publication statusPublished - 2020 Jun 8

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive'. Together they form a unique fingerprint.

  • Cite this