Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive

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2 Citations (Scopus)


This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner with a millimeter-range low-power lens drive for endoscopic biomedical applications. A variation of Japanese origami art, kirigami involves creation of out-of-plane structures by paper cutting and folding. The proposed microscanner is composed of freestanding kirigami film on which the spiral-curved thermal bimorphs are strategically placed. The kirigami microscanner is electrothermally transformed into an out-of-plane circular multistep pyramid by Joule heating. The circular pyramidal kirigami microscanner on a small footprint of 4.5 mm 4.5 mm was fabricated by microelectromechanical system processes. A large four-step pyramidal actuation was successfully demonstrated, and a large 1.1-mm lens travel range at only 128 mW was achieved.

Original languageEnglish
Pages (from-to)17457-17467
Number of pages11
JournalOptics Express
Issue number12
Publication statusPublished - 2020 Jun 8

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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