CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform

Yuta Ooka, Tomohiro Tetsumoto, Akihiro Fushimi, Wataru Yoshiki, Takasumi Tanabe

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Progress on the fabrication of ultrahigh-Q photonic-crystal nanocavities (PhC-NCs) has revealed the prospect for new applications including silicon Raman lasers that require a strong confinement of light. Among various PhC-NCs, the highest Q has been recorded with silicon. On the other hand, microcavity is one of the basic building blocks in silicon photonics. However, the fusion between PhC-NCs and silicon photonics has yet to be exploited, since PhC-NCs are usually fabricated with electron-beam lithography and require an air-bridge structure. Here we show that a 2D-PhC-NC fabricated with deep-UV photolithography on a silica-clad silicon-on-insulator (SOI) structure will exhibit a high-Q of 2.2 ×10<sup>5</sup> with a mode-volume of ~1.7(λp/n)<sup>3</sup>. This is the highest Q demonstrated with photolithography. We also show that this device exhibits an efficient thermal diffusion and enables high-speed switching. The demonstration of the photolithographic fabrication of high-Q silica-clad PhC-NCs will open possibility for mass-manufacturing and boost the fusion between silicon photonics and CMOS devices.

Original languageEnglish
Article number11312
JournalScientific Reports
Volume5
DOIs
Publication statusPublished - 2015 Jun 18

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photolithography
Q factors
CMOS
platforms
photonics
silicon
crystals
fusion
silicon dioxide
bridges (structures)
fabrication
Raman lasers
thermal diffusion
acceleration (physics)
lithography
manufacturing
high speed
insulators
electron beams
air

ASJC Scopus subject areas

  • General

Cite this

CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform. / Ooka, Yuta; Tetsumoto, Tomohiro; Fushimi, Akihiro; Yoshiki, Wataru; Tanabe, Takasumi.

In: Scientific Reports, Vol. 5, 11312, 18.06.2015.

Research output: Contribution to journalArticle

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AU - Tanabe, Takasumi

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