CNT-FET gas sensor using a functionalized ionic liquid as gate

N. Kiga, Y. Takei, A. Inaba, H. Takahashi, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

We propose a gas sensor using combination of carbon nanotubes (CNTs) and ionic liquid (IL). In our research, we used IL, 1-ethyl-3-methyl imidazolium tetrafluoroborate ([EMIM][BF 4]) which specially absorbs CO 2 / NH 3, and polymer, polyethyleneimine (PEI) which absorbs CO 2. This IL or the mixture of IL and PEI dropped on the CNT-FET were applied as a CNT-FET IL-gate and a surface modification material of CNTs. When the IL absorbs specific gases, the ion types and concentrations change. We measured the change of CNT I-V property by applying a voltage to the IL-gate to attract the ions onto the CNT surface.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages796-799
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Externally publishedYes
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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