Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

T. Kitajima, M. Izawa, R. Hashido, Nobuhiko Nakano, T. Makabe

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

Original languageEnglish
Pages (from-to)758-760
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number6
Publication statusPublished - 1996 Aug 5

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light emission
tomography
reactors

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma. / Kitajima, T.; Izawa, M.; Hashido, R.; Nakano, Nobuhiko; Makabe, T.

In: Applied Physics Letters, Vol. 69, No. 6, 05.08.1996, p. 758-760.

Research output: Contribution to journalArticle

Kitajima, T, Izawa, M, Hashido, R, Nakano, N & Makabe, T 1996, 'Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma', Applied Physics Letters, vol. 69, no. 6, pp. 758-760.
Kitajima, T. ; Izawa, M. ; Hashido, R. ; Nakano, Nobuhiko ; Makabe, T. / Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma. In: Applied Physics Letters. 1996 ; Vol. 69, No. 6. pp. 758-760.
@article{3761e449e433406f8038e69f071ec009,
title = "Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma",
abstract = "Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.",
author = "T. Kitajima and M. Izawa and R. Hashido and Nobuhiko Nakano and T. Makabe",
year = "1996",
month = "8",
day = "5",
language = "English",
volume = "69",
pages = "758--760",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "6",

}

TY - JOUR

T1 - Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

AU - Kitajima, T.

AU - Izawa, M.

AU - Hashido, R.

AU - Nakano, Nobuhiko

AU - Makabe, T.

PY - 1996/8/5

Y1 - 1996/8/5

N2 - Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

AB - Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

UR - http://www.scopus.com/inward/record.url?scp=0005691666&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0005691666&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0005691666

VL - 69

SP - 758

EP - 760

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 6

ER -