Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

T. Kitajima, M. Izawa, R. Hashido, N. Nakano, T. Makabe

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Abstract

Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

Original languageEnglish
Pages (from-to)758-760
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number6
DOIs
Publication statusPublished - 1996 Aug 5

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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