Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)