Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform

A. Ishibashi, H. Kaiju, Y. Yamagata, N. Kawaguchi

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.

Original languageEnglish
Pages (from-to)735-736
Number of pages2
JournalElectronics Letters
Volume41
Issue number13
DOIs
Publication statusPublished - 2005 Jun 23
Externally publishedYes

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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