Sub-microsecond excess carrier lifetimes have been measured by a contactless method and the electrical properties have been investigated by the isothermal capacitance method in heat-treated N-type silicon. It is found that the thermally induced donor level at Ev+0.39 eV acts as recombination center. By using the present contactless measurement system, it becomes possible to accurately measure lifetimes as short as 0.07 µsec, and resistivity-lifetime products, ρτ=0.1 Ωcm · µsec, have been achieved.
ASJC Scopus subject areas
- Physics and Astronomy(all)