Control of a 6 DOF Microvibration Testing Device Using Adaptive Digital Filter

Yoshimasa Nishiyama, Masaki Takahashi, Yasutaka Tagawa, Masashi Yasuda

Research output: Contribution to journalArticlepeer-review


Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.

Original languageEnglish
Pages (from-to)641-646
Number of pages6
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Issue number691
Publication statusPublished - 2004
Externally publishedYes


  • 6 DOF System
  • Adaptive Control
  • Coupled Vibration
  • Microvibration Testing Device
  • Modal Analysis
  • Precision Instrument
  • Vibration Control

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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