Abstract
Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.
| Original language | English |
|---|---|
| Pages (from-to) | 641-646 |
| Number of pages | 6 |
| Journal | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
| Volume | 70 |
| Issue number | 691 |
| DOIs | |
| Publication status | Published - 2004 Jan 1 |
| Externally published | Yes |
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Keywords
- 6 DOF System
- Adaptive Control
- Coupled Vibration
- Microvibration Testing Device
- Modal Analysis
- Precision Instrument
- Vibration Control
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering