Control of a 6 DOF microvibration testing device using adaptive digital filter

Yoshimasa Nishiyama, Masaki Takahashi, Yasutaka Tagawa, Masashi Yasuda

Research output: Contribution to journalArticle

Abstract

Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.

Original languageEnglish
Pages (from-to)641-646
Number of pages6
JournalNippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume70
Issue number3
Publication statusPublished - 2004 Mar
Externally publishedYes

Fingerprint

Adaptive filters
Digital filters
Control systems
Testing
Biotechnology
Actuators
Genes
Systems analysis
Semiconductor materials
Controllers
Air
Experiments

Keywords

  • 6 DOF System
  • Adaptive Control
  • Coupled Vibration
  • Microvibration Testing Device
  • Modal Analysis
  • Precision Instrument
  • Vibration Control

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Control of a 6 DOF microvibration testing device using adaptive digital filter. / Nishiyama, Yoshimasa; Takahashi, Masaki; Tagawa, Yasutaka; Yasuda, Masashi.

In: Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 70, No. 3, 03.2004, p. 641-646.

Research output: Contribution to journalArticle

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