Abstract
Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.
| Original language | English |
|---|---|
| Pages (from-to) | 641-646 |
| Number of pages | 6 |
| Journal | Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
| Volume | 70 |
| Issue number | 3 |
| Publication status | Published - 2004 Mar |
| Externally published | Yes |
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Keywords
- 6 DOF System
- Adaptive Control
- Coupled Vibration
- Microvibration Testing Device
- Modal Analysis
- Precision Instrument
- Vibration Control
ASJC Scopus subject areas
- Mechanical Engineering
Cite this
Control of a 6 DOF microvibration testing device using adaptive digital filter. / Nishiyama, Yoshimasa; Takahashi, Masaki; Tagawa, Yasutaka; Yasuda, Masashi.
In: Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 70, No. 3, 03.2004, p. 641-646.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Control of a 6 DOF microvibration testing device using adaptive digital filter
AU - Nishiyama, Yoshimasa
AU - Takahashi, Masaki
AU - Tagawa, Yasutaka
AU - Yasuda, Masashi
PY - 2004/3
Y1 - 2004/3
N2 - Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.
AB - Microvibration control technology has been rapidly becoming important in a number of fields including superfine technoloby in semiconductor manufacturing and bio-technology in gene analysis. In this paper, an active 6 DOF microvibration testing device using air actuators is studied from the view point of control system design. In the previous study, a combination of dual model matching controller and off-line feedforward gave good reference following performance. However, an interference problem to other axes has not been solved. In this study, in order to solve this problem, an adaptive digital filter called Filtered-X is applied to the control system. The effectiveness of the proposed control system is verified through reference following experiments, when a test model is equipped on the table.
KW - 6 DOF System
KW - Adaptive Control
KW - Coupled Vibration
KW - Microvibration Testing Device
KW - Modal Analysis
KW - Precision Instrument
KW - Vibration Control
UR - http://www.scopus.com/inward/record.url?scp=2942617217&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2942617217&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:2942617217
VL - 70
SP - 641
EP - 646
JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
SN - 0387-5024
IS - 3
ER -