Control of structure and film thickness using spray layer-by-layer method: Application to double-layer anti-reflection film

Kyu Hong Kyung, Kouji Fujimoto, Seimei Shiratori

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The recently developed practice of spraying solutions onto a substrate to fabricate thin films via layer-by layer (LBL) method has been further investigated and extended. We successfully fabricated double-layer anti-reflection (AR) thin films with high- and low-refractive-index layers by the spray layer-by-layer (spray-LBL) method. For the deposition of a high-refractive-index layer, layers of poly(diallyldimethylammonium chloride) (PDDA) and titanium(IV) bis(ammoniumlactato) dihydroxide (TALH) were alternatively assembled. The average thickness of (PDDA/TALH) was determined to be 7 nm and the refractive index was n = 1:76 at 550 nm. Poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) layers were assembled on the high-refractive-index layer for the deposition of the low-refractive-index layer. The average thickness of (PAH/PAA) was determined to be 14nm and the refractive index was n = 1:48 at 550 nm. This AR thin film showed the maximum transmittance (94.5%) and the minimum reflection (0.5%) at approximately 550nm in wavelength.

Original languageEnglish
Article number035803
JournalJapanese journal of applied physics
Issue number3
Publication statusPublished - 2011 Mar 1


ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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