Control of structure and film thickness using spray layer-by-layer method: Application to double-layer anti-reflection film

Kyu Hong Kyung, Kouji Fujimoto, Seimei Shiratori

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The recently developed practice of spraying solutions onto a substrate to fabricate thin films via layer-by layer (LBL) method has been further investigated and extended. We successfully fabricated double-layer anti-reflection (AR) thin films with high- and low-refractive-index layers by the spray layer-by-layer (spray-LBL) method. For the deposition of a high-refractive-index layer, layers of poly(diallyldimethylammonium chloride) (PDDA) and titanium(IV) bis(ammoniumlactato) dihydroxide (TALH) were alternatively assembled. The average thickness of (PDDA/TALH) was determined to be 7 nm and the refractive index was n = 1:76 at 550 nm. Poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) layers were assembled on the high-refractive-index layer for the deposition of the low-refractive-index layer. The average thickness of (PAH/PAA) was determined to be 14nm and the refractive index was n = 1:48 at 550 nm. This AR thin film showed the maximum transmittance (94.5%) and the minimum reflection (0.5%) at approximately 550nm in wavelength.

Original languageEnglish
Article number035803
JournalJapanese Journal of Applied Physics
Volume50
Issue number3
DOIs
Publication statusPublished - 2011 Mar

Fingerprint

sprayers
Film thickness
Refractive index
film thickness
Polycyclic aromatic hydrocarbons
refractivity
Thin films
Acrylics
polycyclic aromatic hydrocarbons
Acids
acrylic acid
Spraying
thin films
Titanium
Wavelength
spraying
hydrochlorides
Substrates
transmittance
titanium

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Control of structure and film thickness using spray layer-by-layer method : Application to double-layer anti-reflection film. / Kyung, Kyu Hong; Fujimoto, Kouji; Shiratori, Seimei.

In: Japanese Journal of Applied Physics, Vol. 50, No. 3, 035803, 03.2011.

Research output: Contribution to journalArticle

@article{aa53841812d641e086e97051acacf5a9,
title = "Control of structure and film thickness using spray layer-by-layer method: Application to double-layer anti-reflection film",
abstract = "The recently developed practice of spraying solutions onto a substrate to fabricate thin films via layer-by layer (LBL) method has been further investigated and extended. We successfully fabricated double-layer anti-reflection (AR) thin films with high- and low-refractive-index layers by the spray layer-by-layer (spray-LBL) method. For the deposition of a high-refractive-index layer, layers of poly(diallyldimethylammonium chloride) (PDDA) and titanium(IV) bis(ammoniumlactato) dihydroxide (TALH) were alternatively assembled. The average thickness of (PDDA/TALH) was determined to be 7 nm and the refractive index was n = 1:76 at 550 nm. Poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) layers were assembled on the high-refractive-index layer for the deposition of the low-refractive-index layer. The average thickness of (PAH/PAA) was determined to be 14nm and the refractive index was n = 1:48 at 550 nm. This AR thin film showed the maximum transmittance (94.5{\%}) and the minimum reflection (0.5{\%}) at approximately 550nm in wavelength.",
author = "Kyung, {Kyu Hong} and Kouji Fujimoto and Seimei Shiratori",
year = "2011",
month = "3",
doi = "10.1143/JJAP.50.035803",
language = "English",
volume = "50",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "3",

}

TY - JOUR

T1 - Control of structure and film thickness using spray layer-by-layer method

T2 - Application to double-layer anti-reflection film

AU - Kyung, Kyu Hong

AU - Fujimoto, Kouji

AU - Shiratori, Seimei

PY - 2011/3

Y1 - 2011/3

N2 - The recently developed practice of spraying solutions onto a substrate to fabricate thin films via layer-by layer (LBL) method has been further investigated and extended. We successfully fabricated double-layer anti-reflection (AR) thin films with high- and low-refractive-index layers by the spray layer-by-layer (spray-LBL) method. For the deposition of a high-refractive-index layer, layers of poly(diallyldimethylammonium chloride) (PDDA) and titanium(IV) bis(ammoniumlactato) dihydroxide (TALH) were alternatively assembled. The average thickness of (PDDA/TALH) was determined to be 7 nm and the refractive index was n = 1:76 at 550 nm. Poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) layers were assembled on the high-refractive-index layer for the deposition of the low-refractive-index layer. The average thickness of (PAH/PAA) was determined to be 14nm and the refractive index was n = 1:48 at 550 nm. This AR thin film showed the maximum transmittance (94.5%) and the minimum reflection (0.5%) at approximately 550nm in wavelength.

AB - The recently developed practice of spraying solutions onto a substrate to fabricate thin films via layer-by layer (LBL) method has been further investigated and extended. We successfully fabricated double-layer anti-reflection (AR) thin films with high- and low-refractive-index layers by the spray layer-by-layer (spray-LBL) method. For the deposition of a high-refractive-index layer, layers of poly(diallyldimethylammonium chloride) (PDDA) and titanium(IV) bis(ammoniumlactato) dihydroxide (TALH) were alternatively assembled. The average thickness of (PDDA/TALH) was determined to be 7 nm and the refractive index was n = 1:76 at 550 nm. Poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) layers were assembled on the high-refractive-index layer for the deposition of the low-refractive-index layer. The average thickness of (PAH/PAA) was determined to be 14nm and the refractive index was n = 1:48 at 550 nm. This AR thin film showed the maximum transmittance (94.5%) and the minimum reflection (0.5%) at approximately 550nm in wavelength.

UR - http://www.scopus.com/inward/record.url?scp=79953111435&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953111435&partnerID=8YFLogxK

U2 - 10.1143/JJAP.50.035803

DO - 10.1143/JJAP.50.035803

M3 - Article

AN - SCOPUS:79953111435

VL - 50

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 3

M1 - 035803

ER -