Control of surface morphology of ZnO (0 0 0 1̄) by hydrochloric acid etching

Hideyuki Maki, T. Ikoma, I. Sakaguchi, N. Ohashi, H. Haneda, J. Tanaka, N. Ichinose

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

Chemical etching mechanism of ZnO (0 0 0 1̄) polar surface was investigated to control surface morphology. ZnO single crystal surfaces were etched with a HCl solution, and the morphology changes were observed with an atomic force microscope; hexagonal rings formed on the (0 0 0 1̄) surface due to relatively rapid etching of its terrace faces in comparison with kinks or steps of etch pits. Square patterns of Pt thin films were periodically sputtered on ZnO surfaces using a mask; after etched in HCl solution for 1 day, many hillocks formed with keeping the original square shape. The pattern changed into pointed pyramidal shape after long-duration etching, suggesting that the shapes were influenced by the etching along not only the vertical direction, but also a little of the parallel direction to the surface.

Original languageEnglish
Pages (from-to)91-95
Number of pages5
JournalThin Solid Films
Volume411
Issue number1
DOIs
Publication statusPublished - 2002 May 22
Externally publishedYes

Fingerprint

Hydrochloric Acid
hydrochloric acid
Hydrochloric acid
Surface morphology
Etching
etching
Single crystal surfaces
control surfaces
Control surfaces
crystal surfaces
Masks
Microscopes
masks
microscopes
Thin films
rings
single crystals
thin films
Direction compound

Keywords

  • Atomic force microscopy (AFM)
  • Etching
  • Scanning electron microscopy
  • Surface morphology
  • Zinc oxide

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Maki, H., Ikoma, T., Sakaguchi, I., Ohashi, N., Haneda, H., Tanaka, J., & Ichinose, N. (2002). Control of surface morphology of ZnO (0 0 0 1̄) by hydrochloric acid etching. Thin Solid Films, 411(1), 91-95. https://doi.org/10.1016/S0040-6090(02)00194-3

Control of surface morphology of ZnO (0 0 0 1̄) by hydrochloric acid etching. / Maki, Hideyuki; Ikoma, T.; Sakaguchi, I.; Ohashi, N.; Haneda, H.; Tanaka, J.; Ichinose, N.

In: Thin Solid Films, Vol. 411, No. 1, 22.05.2002, p. 91-95.

Research output: Contribution to journalArticle

Maki, H, Ikoma, T, Sakaguchi, I, Ohashi, N, Haneda, H, Tanaka, J & Ichinose, N 2002, 'Control of surface morphology of ZnO (0 0 0 1̄) by hydrochloric acid etching', Thin Solid Films, vol. 411, no. 1, pp. 91-95. https://doi.org/10.1016/S0040-6090(02)00194-3
Maki, Hideyuki ; Ikoma, T. ; Sakaguchi, I. ; Ohashi, N. ; Haneda, H. ; Tanaka, J. ; Ichinose, N. / Control of surface morphology of ZnO (0 0 0 1̄) by hydrochloric acid etching. In: Thin Solid Films. 2002 ; Vol. 411, No. 1. pp. 91-95.
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