Controlling factors for the conversion of trifluoroacetate sols into thin metal fluoride coatings

Shinobu Fujihara, Munehiro Tada, Toshio Kimura

Research output: Contribution to journalConference article

51 Citations (Scopus)

Abstract

Metal fluoride films were prepared from trifluoroacetate sols by a spin-coating method. Effects of preparation conditions on the deposition of fluoride films have been examined in order to control the thickness and the refractive index of the films. It was suggested that the fluoride was formed by the thermal decomposition of the trifluoroacetate sols generating gaseous phases such as (CF3CO)2O, CO and CO2. This reaction mechanism seemed to largely effect the deposition of the fluoride films in terms of the formation of pores. Characteristics of the fluoride films could be changed by varying the heat treatment. The refractive index of the MgF2 films decreased with increasing heating temperature, which might result from the increased porosity of the films. Drying the film before the heat treatments was effective in the control of the refractive index.

Original languageEnglish
Pages (from-to)311-314
Number of pages4
JournalJournal of Sol-Gel Science and Technology
Volume19
Issue number1-3
DOIs
Publication statusPublished - 2000 Dec 1
Event10th International Workshop pn Glass and Ceramics, Hybrids and Nanocomposites from Gels - Yokohama, Jpn
Duration: 1999 Sep 201999 Sep 24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

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