Coolant effects on tool wear in machining single-crystal silicon with diamond tools

Tsutomu Ohta, Jiwang Yan, Sunao Kodera, Shuuma Yajima, Naoyuki Horikawa, Youichi Takahashi, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

Original languageEnglish
Pages (from-to)144-150
Number of pages7
JournalKey Engineering Materials
Volume389-390
DOIs
Publication statusPublished - 2009
Externally publishedYes

Fingerprint

Diamond
Silicon
Coolants
Diamonds
Machining
Wear of materials
Single crystals
Oils
Water
Service life
Geometry

Keywords

  • Coolant
  • Diamond turning
  • Ductile cutting
  • Infrared lens
  • Single-crystal silicon
  • Tool wear

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Ohta, T., Yan, J., Kodera, S., Yajima, S., Horikawa, N., Takahashi, Y., & Kuriyagawa, T. (2009). Coolant effects on tool wear in machining single-crystal silicon with diamond tools. Key Engineering Materials, 389-390, 144-150. https://doi.org/10.4028/0-87849-364-6.144

Coolant effects on tool wear in machining single-crystal silicon with diamond tools. / Ohta, Tsutomu; Yan, Jiwang; Kodera, Sunao; Yajima, Shuuma; Horikawa, Naoyuki; Takahashi, Youichi; Kuriyagawa, Tsunemoto.

In: Key Engineering Materials, Vol. 389-390, 2009, p. 144-150.

Research output: Contribution to journalArticle

Ohta, T, Yan, J, Kodera, S, Yajima, S, Horikawa, N, Takahashi, Y & Kuriyagawa, T 2009, 'Coolant effects on tool wear in machining single-crystal silicon with diamond tools', Key Engineering Materials, vol. 389-390, pp. 144-150. https://doi.org/10.4028/0-87849-364-6.144
Ohta, Tsutomu ; Yan, Jiwang ; Kodera, Sunao ; Yajima, Shuuma ; Horikawa, Naoyuki ; Takahashi, Youichi ; Kuriyagawa, Tsunemoto. / Coolant effects on tool wear in machining single-crystal silicon with diamond tools. In: Key Engineering Materials. 2009 ; Vol. 389-390. pp. 144-150.
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