CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

János Szívós; Szilárd Pothorszky; Jan Soltys; Miklós Serényi; Hongyu An; Tenghua Gao; András Deák; Ji Shi; György Sáfrán

doi:10.1016/j.apsusc.2017.11.062

CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

János Szívós, Szilárd Pothorszky, Jan Soltys, Miklós Serényi, Hongyu An, Tenghua Gao, András Deák, Ji Shi, György Sáfrán

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

CoPt thin films as possible candidates for Bit Patterned magnetic Media (BPM) were prepared and investigated by electron microscopy techniques and magnetic measurements. The structure and morphology of the Direct Current (DC) sputtered films with N incorporation were revealed in both as-prepared and annealed state. Nanopatterning of the samples was carried out by means of Radio Frequency (RF) plasma etching through a Langmuir-Blodgett film of silica nanospheres that is a fast and high throughput technique. As a result, the samples with hexagonally arranged 100 nm size separated dots of fct-phase CoPt were obtained. The influence of the order of nanopatterning and anneling on the nanostructure formation was revealed. The magnetic properties of the nanopatterned fct CoPt films were investigated by Vibrating Sample Magnetometer (VSM) and Magnetic Force Microscopy (MFM). The results show that CoPt thin film nanopatterned by means of the RF plasma etching technique is promising candidate to a possible realization of BPM. Furthermore, this technique is versatile and suitable for scaling up to technological and industrial applications.

Original language	English
Pages (from-to)	31-38
Number of pages	8
Journal	Applied Surface Science
Volume	435
DOIs	https://doi.org/10.1016/j.apsusc.2017.11.062
Publication status	Published - 2018 Mar 30
Externally published	Yes

Keywords

Ferromagnetic thin films
Langmuir-Blodgett film
Nanopatterning
Ordered nanostructures
RF plasma etching

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2017.11.062

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title = "CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media",

abstract = "CoPt thin films as possible candidates for Bit Patterned magnetic Media (BPM) were prepared and investigated by electron microscopy techniques and magnetic measurements. The structure and morphology of the Direct Current (DC) sputtered films with N incorporation were revealed in both as-prepared and annealed state. Nanopatterning of the samples was carried out by means of Radio Frequency (RF) plasma etching through a Langmuir-Blodgett film of silica nanospheres that is a fast and high throughput technique. As a result, the samples with hexagonally arranged 100 nm size separated dots of fct-phase CoPt were obtained. The influence of the order of nanopatterning and anneling on the nanostructure formation was revealed. The magnetic properties of the nanopatterned fct CoPt films were investigated by Vibrating Sample Magnetometer (VSM) and Magnetic Force Microscopy (MFM). The results show that CoPt thin film nanopatterned by means of the RF plasma etching technique is promising candidate to a possible realization of BPM. Furthermore, this technique is versatile and suitable for scaling up to technological and industrial applications.",

keywords = "Ferromagnetic thin films, Langmuir-Blodgett film, Nanopatterning, Ordered nanostructures, RF plasma etching",

author = "J{\'a}nos Sz{\'i}v{\'o}s and Szil{\'a}rd Pothorszky and Jan Soltys and Mikl{\'o}s Ser{\'e}nyi and Hongyu An and Tenghua Gao and Andr{\'a}s De{\'a}k and Ji Shi and Gy{\"o}rgy S{\'a}fr{\'a}n",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2018",

month = mar,

day = "30",

doi = "10.1016/j.apsusc.2017.11.062",

language = "English",

volume = "435",

pages = "31--38",

journal = "Applied Surface Science",

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TY - JOUR

T1 - CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

AU - Szívós, János

AU - Pothorszky, Szilárd

AU - Soltys, Jan

AU - Serényi, Miklós

AU - An, Hongyu

AU - Gao, Tenghua

AU - Deák, András

AU - Shi, Ji

AU - Sáfrán, György

PY - 2018/3/30

Y1 - 2018/3/30

N2 - CoPt thin films as possible candidates for Bit Patterned magnetic Media (BPM) were prepared and investigated by electron microscopy techniques and magnetic measurements. The structure and morphology of the Direct Current (DC) sputtered films with N incorporation were revealed in both as-prepared and annealed state. Nanopatterning of the samples was carried out by means of Radio Frequency (RF) plasma etching through a Langmuir-Blodgett film of silica nanospheres that is a fast and high throughput technique. As a result, the samples with hexagonally arranged 100 nm size separated dots of fct-phase CoPt were obtained. The influence of the order of nanopatterning and anneling on the nanostructure formation was revealed. The magnetic properties of the nanopatterned fct CoPt films were investigated by Vibrating Sample Magnetometer (VSM) and Magnetic Force Microscopy (MFM). The results show that CoPt thin film nanopatterned by means of the RF plasma etching technique is promising candidate to a possible realization of BPM. Furthermore, this technique is versatile and suitable for scaling up to technological and industrial applications.

AB - CoPt thin films as possible candidates for Bit Patterned magnetic Media (BPM) were prepared and investigated by electron microscopy techniques and magnetic measurements. The structure and morphology of the Direct Current (DC) sputtered films with N incorporation were revealed in both as-prepared and annealed state. Nanopatterning of the samples was carried out by means of Radio Frequency (RF) plasma etching through a Langmuir-Blodgett film of silica nanospheres that is a fast and high throughput technique. As a result, the samples with hexagonally arranged 100 nm size separated dots of fct-phase CoPt were obtained. The influence of the order of nanopatterning and anneling on the nanostructure formation was revealed. The magnetic properties of the nanopatterned fct CoPt films were investigated by Vibrating Sample Magnetometer (VSM) and Magnetic Force Microscopy (MFM). The results show that CoPt thin film nanopatterned by means of the RF plasma etching technique is promising candidate to a possible realization of BPM. Furthermore, this technique is versatile and suitable for scaling up to technological and industrial applications.

KW - Ferromagnetic thin films

KW - Langmuir-Blodgett film

KW - Nanopatterning

KW - Ordered nanostructures

KW - RF plasma etching

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CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

Abstract

Keywords

ASJC Scopus subject areas

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