CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

János Szívós, Szilárd Pothorszky, Jan Soltys, Miklós Serényi, Hongyu An, Tenghua Gao, András Deák, Ji Shi, György Sáfrán

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4 Citations (Scopus)

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Engineering & Materials Science

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Physics & Astronomy