Corrosion resistance of aluminum nitride as semiconductor equipment parts studied by micro-Raman spectroscopy

Hirotaka Fujimori, Yoji Tamura, Akira Harita, Koji Ioku, Masato Kakihana, Masahiro Yoshimura, Seishi Goto

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A micro-Raman spectroscopic investigation has been performed to observe structural disorder in each grain of aluminum nitride ceramics as semiconductor equipment parts. A selective thermal oxidation treatment normalizes a different rate of a corrosion reaction depending on the crystal face and consequently improves the corrosion resistance. Upon thermal oxidation treatment, line widths of Raman bands increased more in grains including mainly crystals with (100) preferred orientation than in those of (002), indicating that (100) faces oxidize preferentially rather than (002) faces. According to Raman shift from the oxidized sample, oxidation induces residual compressive stress for grains including a large number of (100) prefer-oriented crystals. On fluorination of the oxidized sample, no increase of line widths was observed in both kinds of grains, suggesting that prior anisotropic thermal oxidation treatment of (100) faces, which are more sensitive to corrosion than (002) faces, inhibits the progress of corrosion.

Original languageEnglish
Pages (from-to)935-938
Number of pages4
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume111
Issue number1300
Publication statusPublished - 2003 Dec
Externally publishedYes

Fingerprint

Aluminum nitride
aluminum nitrides
corrosion resistance
Corrosion resistance
Raman spectroscopy
Semiconductor materials
Oxidation
corrosion
oxidation
Corrosion
Linewidth
Crystals
crystals
Fluorination
fluorination
Compressive stress
Crystal orientation
Residual stresses
disorders
ceramics

Keywords

  • Aluminum nitride
  • Corrosion resistance
  • Micro-Raman
  • Semiconductor equipment parts

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Corrosion resistance of aluminum nitride as semiconductor equipment parts studied by micro-Raman spectroscopy. / Fujimori, Hirotaka; Tamura, Yoji; Harita, Akira; Ioku, Koji; Kakihana, Masato; Yoshimura, Masahiro; Goto, Seishi.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 111, No. 1300, 12.2003, p. 935-938.

Research output: Contribution to journalArticle

Fujimori, Hirotaka ; Tamura, Yoji ; Harita, Akira ; Ioku, Koji ; Kakihana, Masato ; Yoshimura, Masahiro ; Goto, Seishi. / Corrosion resistance of aluminum nitride as semiconductor equipment parts studied by micro-Raman spectroscopy. In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan. 2003 ; Vol. 111, No. 1300. pp. 935-938.
@article{d047ab6cd5d54fbb97d7e5d43bc6e2f0,
title = "Corrosion resistance of aluminum nitride as semiconductor equipment parts studied by micro-Raman spectroscopy",
abstract = "A micro-Raman spectroscopic investigation has been performed to observe structural disorder in each grain of aluminum nitride ceramics as semiconductor equipment parts. A selective thermal oxidation treatment normalizes a different rate of a corrosion reaction depending on the crystal face and consequently improves the corrosion resistance. Upon thermal oxidation treatment, line widths of Raman bands increased more in grains including mainly crystals with (100) preferred orientation than in those of (002), indicating that (100) faces oxidize preferentially rather than (002) faces. According to Raman shift from the oxidized sample, oxidation induces residual compressive stress for grains including a large number of (100) prefer-oriented crystals. On fluorination of the oxidized sample, no increase of line widths was observed in both kinds of grains, suggesting that prior anisotropic thermal oxidation treatment of (100) faces, which are more sensitive to corrosion than (002) faces, inhibits the progress of corrosion.",
keywords = "Aluminum nitride, Corrosion resistance, Micro-Raman, Semiconductor equipment parts",
author = "Hirotaka Fujimori and Yoji Tamura and Akira Harita and Koji Ioku and Masato Kakihana and Masahiro Yoshimura and Seishi Goto",
year = "2003",
month = "12",
language = "English",
volume = "111",
pages = "935--938",
journal = "Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan",
issn = "0914-5400",
publisher = "Ceramic Society of Japan/Nippon Seramikkusu Kyokai",
number = "1300",

}

TY - JOUR

T1 - Corrosion resistance of aluminum nitride as semiconductor equipment parts studied by micro-Raman spectroscopy

AU - Fujimori, Hirotaka

AU - Tamura, Yoji

AU - Harita, Akira

AU - Ioku, Koji

AU - Kakihana, Masato

AU - Yoshimura, Masahiro

AU - Goto, Seishi

PY - 2003/12

Y1 - 2003/12

N2 - A micro-Raman spectroscopic investigation has been performed to observe structural disorder in each grain of aluminum nitride ceramics as semiconductor equipment parts. A selective thermal oxidation treatment normalizes a different rate of a corrosion reaction depending on the crystal face and consequently improves the corrosion resistance. Upon thermal oxidation treatment, line widths of Raman bands increased more in grains including mainly crystals with (100) preferred orientation than in those of (002), indicating that (100) faces oxidize preferentially rather than (002) faces. According to Raman shift from the oxidized sample, oxidation induces residual compressive stress for grains including a large number of (100) prefer-oriented crystals. On fluorination of the oxidized sample, no increase of line widths was observed in both kinds of grains, suggesting that prior anisotropic thermal oxidation treatment of (100) faces, which are more sensitive to corrosion than (002) faces, inhibits the progress of corrosion.

AB - A micro-Raman spectroscopic investigation has been performed to observe structural disorder in each grain of aluminum nitride ceramics as semiconductor equipment parts. A selective thermal oxidation treatment normalizes a different rate of a corrosion reaction depending on the crystal face and consequently improves the corrosion resistance. Upon thermal oxidation treatment, line widths of Raman bands increased more in grains including mainly crystals with (100) preferred orientation than in those of (002), indicating that (100) faces oxidize preferentially rather than (002) faces. According to Raman shift from the oxidized sample, oxidation induces residual compressive stress for grains including a large number of (100) prefer-oriented crystals. On fluorination of the oxidized sample, no increase of line widths was observed in both kinds of grains, suggesting that prior anisotropic thermal oxidation treatment of (100) faces, which are more sensitive to corrosion than (002) faces, inhibits the progress of corrosion.

KW - Aluminum nitride

KW - Corrosion resistance

KW - Micro-Raman

KW - Semiconductor equipment parts

UR - http://www.scopus.com/inward/record.url?scp=0346009255&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0346009255&partnerID=8YFLogxK

M3 - Article

VL - 111

SP - 935

EP - 938

JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

SN - 0914-5400

IS - 1300

ER -