Corrosion resistance of aluminum nitride as semiconductor equipment parts studied by micro-Raman spectroscopy

Hirotaka Fujimori, Yoji Tamura, Akira Harita, Koji Ioku, Masato Kakihana, Masahiro Yoshimura, Seishi Goto

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds