Cryogenic micromachining of PDMS for microfluidic chips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

PDMS (polydimethylsiloxane) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. In addition, there are restrictions to fabricated shapes in their techniques. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, the micro milling has not yet been applied to the soft polymer materials because of their high compliant properties at room temperature. In this study, the cryogenic micro milling process is proposed for fabrication of the micro channels on PDMS and its performance is analyzed experimentally. The results of the cutting tests show that the 3D shaped micro groove can be processed precisely and rapidly on the PDMS by the proposed cryogenic machining method.

Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
EditorsHendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
Publishereuspen
Pages20-23
Number of pages4
ISBN (Electronic)9780955308253
Publication statusPublished - 2008 Jan 1
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
Duration: 2008 May 182008 May 22

Publication series

NameProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Volume2

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
CountrySwitzerland
CityZurich
Period08/5/1808/5/22

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Industrial and Manufacturing Engineering

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  • Cite this

    Kakinuma, Y., Yasuda, N., & Aoyama, T. (2008). Cryogenic micromachining of PDMS for microfluidic chips. In H. Van Brussel, E. Brinksmeier, H. Spaan, & T. Burke (Eds.), Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 (pp. 20-23). (Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008; Vol. 2). euspen.