TY - GEN
T1 - Cryogenic micromachining of PDMS for microfluidic chips
AU - Kakinuma, Y.
AU - Yasuda, N.
AU - Aoyama, T.
PY - 2008/1/1
Y1 - 2008/1/1
N2 - PDMS (polydimethylsiloxane) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. In addition, there are restrictions to fabricated shapes in their techniques. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, the micro milling has not yet been applied to the soft polymer materials because of their high compliant properties at room temperature. In this study, the cryogenic micro milling process is proposed for fabrication of the micro channels on PDMS and its performance is analyzed experimentally. The results of the cutting tests show that the 3D shaped micro groove can be processed precisely and rapidly on the PDMS by the proposed cryogenic machining method.
AB - PDMS (polydimethylsiloxane) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. In addition, there are restrictions to fabricated shapes in their techniques. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, the micro milling has not yet been applied to the soft polymer materials because of their high compliant properties at room temperature. In this study, the cryogenic micro milling process is proposed for fabrication of the micro channels on PDMS and its performance is analyzed experimentally. The results of the cutting tests show that the 3D shaped micro groove can be processed precisely and rapidly on the PDMS by the proposed cryogenic machining method.
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M3 - Conference contribution
AN - SCOPUS:68049135010
T3 - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
SP - 20
EP - 23
BT - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
A2 - Van Brussel, Hendrik
A2 - Brinksmeier, E.
A2 - Spaan, H.
A2 - Burke, T.
PB - euspen
T2 - 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Y2 - 18 May 2008 through 22 May 2008
ER -