Crystal orientation effect on local adhesion strength of the interface between a damascene copper line and the insulation layer

Nobuyuki Shishido, Yuka Oura, Hisashi Sato, Shoji Kamiya, Kozo Koiwa, Masaki Omiya, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Takeshi Nokuo, Toshiaki Suzuki

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3 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy