Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride

Jiwang Yan, Katsuo Syoji, Jun'ichi Tamaki

Research output: Contribution to journalArticle

39 Citations (Scopus)
Original languageEnglish
Pages (from-to)46-51
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number1
DOIs
Publication statusPublished - 2004 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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