Abstract
The spectroscopic light scattering was used to study the growth of polycrystalline Cu(In1-xGax)Se2 thin films. A three-stage deposition process was used for the growth of the films. The ways to adjust the final roughness of a film was discussed. The spectroscopic light scattering was on-line monitored for process control.
Original language | English |
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Pages (from-to) | 2091-2093 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 13 |
DOIs | |
Publication status | Published - 2003 Mar 31 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)