The spectroscopic light scattering was used to study the growth of polycrystalline Cu(In1-xGax)Se2 thin films. A three-stage deposition process was used for the growth of the films. The ways to adjust the final roughness of a film was discussed. The spectroscopic light scattering was on-line monitored for process control.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 2003 Mar 31|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)