Damage Free Dicing Method for MEMS Devices

Yoshinori Matsumoto, Yoshio Awatani, Kei Kato

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This paper presents a dicing method for MEMS devices without dameges during the dicing process. The method is based on bonding and detachment of a glass cap plate by using thermoplastic adhesive. Sand blast technique was used for the fabrication of glass cap plate which has concavities in the depth of 100^m. The thermoplastic adhesive was screen printed on the glass plate. The plate was thermocompression-bonded to silicon wafer at 210°C and diced to individual chips without damages from water or dicing dusts. The chip was mounted in the package while the glass cap was removed at 330C.

Original languageEnglish
Pages (from-to)255-256
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume123
Issue number7
DOIs
Publication statusPublished - 2003

Fingerprint

MEMS
Glass
Thermoplastics
Adhesives
Silicon wafers
Dust
Sand
Fabrication
Water

Keywords

  • damage free
  • dicing
  • MEMS
  • thermocompression-bonding
  • thermoplastic adhesive

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Damage Free Dicing Method for MEMS Devices. / Matsumoto, Yoshinori; Awatani, Yoshio; Kato, Kei.

In: IEEJ Transactions on Sensors and Micromachines, Vol. 123, No. 7, 2003, p. 255-256.

Research output: Contribution to journalArticle

Matsumoto, Yoshinori ; Awatani, Yoshio ; Kato, Kei. / Damage Free Dicing Method for MEMS Devices. In: IEEJ Transactions on Sensors and Micromachines. 2003 ; Vol. 123, No. 7. pp. 255-256.
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