Damage-free top-down processes for fabricating two-dimensional arrays of 7nm GaAs nanodiscs using bio-templates and neutral beam etching

Xuan Yu Wang, Chi Hsien Huang, Rikako Tsukamoto, Pierre Andre Mortemousque, Kohei M. Itoh, Yuzo Ohno, Seiji Samukawa

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds