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Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
Z. Lj Petrović, Z. M. Raspopović, V. D. Stojanović, J. V. Jovanović, G. Malović, T. Makabe, J. de Urquijo
Research output: Contribution to journal › Article › peer-review
49
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(Scopus)