Fingerprint Dive into the research topics of 'Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
Z. Lj Petrović, Z. M. Raspopović, V. D. Stojanović, J. V. Jovanović, G. Malović, T. Makabe, J. de Urquijo
Research output: Contribution to journal › Article › peer-review
50
Citations
(Scopus)