Densely Arrayed Active Antennas Embedded in Vertical Nanoholes for Backside-Illuminated Silicon-Based Broadband Infrared Photodetection

Shun Yasunaga, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama, Tetsuo Kan

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science