Dependence of driving frequency on capacitively coupled plasma in CF4

Sumie Segawa, Masaru Kurihara, Nobuhiko Nakano, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Dependence of driving frequency on capacitively coupled plasma in CF<sub>4</sub>'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy