Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation

Y. Ueno, T. Fujii, Fumihiko Kannari

Research output: Contribution to journalArticle

59 Citations (Scopus)

Abstract

In this study, polytetrafluoroethylene (PTFE) thin films were grown by laser ablation using an F2 laser at 157 nm where PTFE shows the highest optical absorption. It was shown that the vacuum-ultraviolet laser ablation can be used to deposit a highly crystallized PTFE film with a smooth surface morphology at relatively high atmosphere of 200 mTorr. The significant in-plume reaction expected for the ablation with the shorter laser wavelength did not alter the film composition. However, significant development of sputtered particles were observed, of which velocity was much slower than small molecular fragments, during time-resolved shadow graph experiments on laser ablation plumes. Thus, the stoichiometric transfer from the target film observed in the laser ablation deposition may be ascribed to the clusters. Film surface analyses were carried out by x-ray photoemission spectroscopy, scanning electron microscopy, x-ray diffraction, and ellipsometry at a wavelength of 632.8 nm.

Original languageEnglish
Pages (from-to)1370-1372
Number of pages3
JournalApplied Physics Letters
Volume65
Issue number11
DOIs
Publication statusPublished - 1994 Jan 1

Fingerprint

fluoropolymers
ultraviolet lasers
laser ablation
polytetrafluoroethylene
vacuum
thin films
plumes
wavelengths
ablation
ellipsometry
lasers
optical absorption
x ray diffraction
photoelectric emission
deposits
fragments
atmospheres
scanning electron microscopy
spectroscopy
x rays

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation. / Ueno, Y.; Fujii, T.; Kannari, Fumihiko.

In: Applied Physics Letters, Vol. 65, No. 11, 01.01.1994, p. 1370-1372.

Research output: Contribution to journalArticle

@article{56af54ae140b48e991b33001dd603a67,
title = "Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation",
abstract = "In this study, polytetrafluoroethylene (PTFE) thin films were grown by laser ablation using an F2 laser at 157 nm where PTFE shows the highest optical absorption. It was shown that the vacuum-ultraviolet laser ablation can be used to deposit a highly crystallized PTFE film with a smooth surface morphology at relatively high atmosphere of 200 mTorr. The significant in-plume reaction expected for the ablation with the shorter laser wavelength did not alter the film composition. However, significant development of sputtered particles were observed, of which velocity was much slower than small molecular fragments, during time-resolved shadow graph experiments on laser ablation plumes. Thus, the stoichiometric transfer from the target film observed in the laser ablation deposition may be ascribed to the clusters. Film surface analyses were carried out by x-ray photoemission spectroscopy, scanning electron microscopy, x-ray diffraction, and ellipsometry at a wavelength of 632.8 nm.",
author = "Y. Ueno and T. Fujii and Fumihiko Kannari",
year = "1994",
month = "1",
day = "1",
doi = "10.1063/1.112055",
language = "English",
volume = "65",
pages = "1370--1372",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "11",

}

TY - JOUR

T1 - Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation

AU - Ueno, Y.

AU - Fujii, T.

AU - Kannari, Fumihiko

PY - 1994/1/1

Y1 - 1994/1/1

N2 - In this study, polytetrafluoroethylene (PTFE) thin films were grown by laser ablation using an F2 laser at 157 nm where PTFE shows the highest optical absorption. It was shown that the vacuum-ultraviolet laser ablation can be used to deposit a highly crystallized PTFE film with a smooth surface morphology at relatively high atmosphere of 200 mTorr. The significant in-plume reaction expected for the ablation with the shorter laser wavelength did not alter the film composition. However, significant development of sputtered particles were observed, of which velocity was much slower than small molecular fragments, during time-resolved shadow graph experiments on laser ablation plumes. Thus, the stoichiometric transfer from the target film observed in the laser ablation deposition may be ascribed to the clusters. Film surface analyses were carried out by x-ray photoemission spectroscopy, scanning electron microscopy, x-ray diffraction, and ellipsometry at a wavelength of 632.8 nm.

AB - In this study, polytetrafluoroethylene (PTFE) thin films were grown by laser ablation using an F2 laser at 157 nm where PTFE shows the highest optical absorption. It was shown that the vacuum-ultraviolet laser ablation can be used to deposit a highly crystallized PTFE film with a smooth surface morphology at relatively high atmosphere of 200 mTorr. The significant in-plume reaction expected for the ablation with the shorter laser wavelength did not alter the film composition. However, significant development of sputtered particles were observed, of which velocity was much slower than small molecular fragments, during time-resolved shadow graph experiments on laser ablation plumes. Thus, the stoichiometric transfer from the target film observed in the laser ablation deposition may be ascribed to the clusters. Film surface analyses were carried out by x-ray photoemission spectroscopy, scanning electron microscopy, x-ray diffraction, and ellipsometry at a wavelength of 632.8 nm.

UR - http://www.scopus.com/inward/record.url?scp=0028514574&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028514574&partnerID=8YFLogxK

U2 - 10.1063/1.112055

DO - 10.1063/1.112055

M3 - Article

AN - SCOPUS:0028514574

VL - 65

SP - 1370

EP - 1372

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 11

ER -