Deposition of functional organic thin films by laser ablation using UV and VUV lasers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The production of a wide variety of films by laser ablation has been actively studied. In particular, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. A review is given on the previous studies of organic thin film fabrication via UV and VUV lasers. Some new directions of the development are proposed with relating primitive experimental results.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
PublisherIEEE
Pages686-687
Number of pages2
Volume3
Publication statusPublished - 1999
Externally publishedYes
EventProceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) - Seoul, South Korea
Duration: 1999 Aug 301999 Sep 3

Other

OtherProceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99)
CitySeoul, South Korea
Period99/8/3099/9/3

Fingerprint

ultraviolet lasers
laser ablation
ceramics
superconducting films
thin films
excimer lasers
lasers
fabrication

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Kannari, F. (1999). Deposition of functional organic thin films by laser ablation using UV and VUV lasers. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (Vol. 3, pp. 686-687). IEEE.

Deposition of functional organic thin films by laser ablation using UV and VUV lasers. / Kannari, Fumihiko.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 3 IEEE, 1999. p. 686-687.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kannari, F 1999, Deposition of functional organic thin films by laser ablation using UV and VUV lasers. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. vol. 3, IEEE, pp. 686-687, Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99), Seoul, South Korea, 99/8/30.
Kannari F. Deposition of functional organic thin films by laser ablation using UV and VUV lasers. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 3. IEEE. 1999. p. 686-687
Kannari, Fumihiko. / Deposition of functional organic thin films by laser ablation using UV and VUV lasers. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 3 IEEE, 1999. pp. 686-687
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