Deposition of functional organic thin films by laser ablation using UV and VUV lasers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The production of a wide variety of films by laser ablation has been actively studied. Particularly, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. Although there is less experimental results available on organic thin film deposition with ultraviolet laser ablation, various organic polymer or even non-polymer organic materials have been reconstructed via laser ablation. Compared with vacuum evaporation technique, which is widely used to fabricate organic thin films, the laser ablation deposition process is more suitable for producing multi-layered hetero-structures under laser pulse control. Moreover, when taking advantages of other prospects in laser ablation, some novel processings are realizable. In this paper, our previous studies on the organic thin film fabrication via UV and VUV lasers are reviewed, and also some new directions of the development are proposed with relating primitive experimental results.

Original languageEnglish
Title of host publicationCLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages686-687
Number of pages2
ISBN (Electronic)0780356616, 9780780356610
DOIs
Publication statusPublished - 1999 Jan 1
Externally publishedYes
Event1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 - Seoul, Korea, Republic of
Duration: 1999 Aug 301999 Sep 3

Publication series

NameCLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
Volume3

Conference

Conference1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999
CountryKorea, Republic of
CitySeoul
Period99/8/3099/9/3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications
  • Physics and Astronomy(all)

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  • Cite this

    Kannari, F. (1999). Deposition of functional organic thin films by laser ablation using UV and VUV lasers. In CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics (pp. 686-687). [817782] (CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics; Vol. 3). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.1999.817782