Abstract
The production of a wide variety of films by laser ablation has been actively studied. In particular, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. A review is given on the previous studies of organic thin film fabrication via UV and VUV lasers. Some new directions of the development are proposed with relating primitive experimental results.
| Original language | English |
|---|---|
| Title of host publication | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
| Publisher | IEEE |
| Pages | 686-687 |
| Number of pages | 2 |
| Volume | 3 |
| Publication status | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) - Seoul, South Korea Duration: 1999 Aug 30 → 1999 Sep 3 |
Other
| Other | Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) |
|---|---|
| City | Seoul, South Korea |
| Period | 99/8/30 → 99/9/3 |
Fingerprint
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Deposition of functional organic thin films by laser ablation using UV and VUV lasers. / Kannari, Fumihiko.
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 3 IEEE, 1999. p. 686-687.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Deposition of functional organic thin films by laser ablation using UV and VUV lasers
AU - Kannari, Fumihiko
PY - 1999
Y1 - 1999
N2 - The production of a wide variety of films by laser ablation has been actively studied. In particular, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. A review is given on the previous studies of organic thin film fabrication via UV and VUV lasers. Some new directions of the development are proposed with relating primitive experimental results.
AB - The production of a wide variety of films by laser ablation has been actively studied. In particular, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. A review is given on the previous studies of organic thin film fabrication via UV and VUV lasers. Some new directions of the development are proposed with relating primitive experimental results.
UR - http://www.scopus.com/inward/record.url?scp=0033310099&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033310099&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0033310099
VL - 3
SP - 686
EP - 687
BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
PB - IEEE
ER -