TY - GEN
T1 - Deposition of functional organic thin films by laser ablation using UV and VUV lasers
AU - Kannari, F.
PY - 1999/1/1
Y1 - 1999/1/1
N2 - The production of a wide variety of films by laser ablation has been actively studied. Particularly, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. Although there is less experimental results available on organic thin film deposition with ultraviolet laser ablation, various organic polymer or even non-polymer organic materials have been reconstructed via laser ablation. Compared with vacuum evaporation technique, which is widely used to fabricate organic thin films, the laser ablation deposition process is more suitable for producing multi-layered hetero-structures under laser pulse control. Moreover, when taking advantages of other prospects in laser ablation, some novel processings are realizable. In this paper, our previous studies on the organic thin film fabrication via UV and VUV lasers are reviewed, and also some new directions of the development are proposed with relating primitive experimental results.
AB - The production of a wide variety of films by laser ablation has been actively studied. Particularly, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. Although there is less experimental results available on organic thin film deposition with ultraviolet laser ablation, various organic polymer or even non-polymer organic materials have been reconstructed via laser ablation. Compared with vacuum evaporation technique, which is widely used to fabricate organic thin films, the laser ablation deposition process is more suitable for producing multi-layered hetero-structures under laser pulse control. Moreover, when taking advantages of other prospects in laser ablation, some novel processings are realizable. In this paper, our previous studies on the organic thin film fabrication via UV and VUV lasers are reviewed, and also some new directions of the development are proposed with relating primitive experimental results.
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U2 - 10.1109/CLEOPR.1999.817782
DO - 10.1109/CLEOPR.1999.817782
M3 - Conference contribution
AN - SCOPUS:0033310099
T3 - CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
SP - 686
EP - 687
BT - CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999
Y2 - 30 August 1999 through 3 September 1999
ER -