A multi-degree-of-freedom (DOF) ultrasonic motor consisting of a bar-shaped stator and a spherical rotor was developed. It can generate 3-DOF rotation of the rotor around perpendicular axes using bending vibrations and a longitudinal vibration of the stator, which was designed using finite element analysis. From the simulated driving characteristics, a control method for the ultrasonic motor was proposed. Following this, the driving characteristics of the motor under open-loop control and closed-loop control were measured experimentally. Multi-DOF position control of the rotor was achieved successfully using the proposed control method.
- Finite element analysis
- Ultrasonic motor
ASJC Scopus subject areas
- Control and Systems Engineering
- Computer Science Applications
- Electrical and Electronic Engineering