Design, fabrication and characterization of a high <formula><tex>$Q$</tex></formula> silica nanobeam cavity with orthogonal resonant modes

Tomohiro Tetsumoto, Hajime Kumazaki, Kentaro Furusawa, Norihiko Sekine, Takasumi Tanabe

Research output: Contribution to journalArticle


We design and fabricate a high <formula><tex>$Q$</tex></formula> silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic (TM) modes in the 1.55 &#x03BC;m wavelength range. The <formula><tex>$Q$</tex></formula> values obtained for both modes exceed 10<formula><tex>$^{4}$</tex></formula> and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded <formula><tex>$Q$</tex></formula> of more than 10<formula><tex>$^{4}$</tex></formula>. We also found that the presence of a coupled waveguide reduces the intrinsic <formula><tex>$Q$</tex></formula> of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low index PhC nanocavities.

Original languageEnglish
JournalIEEE Photonics Journal
Publication statusAccepted/In press - 2017 Sep 19



  • Cavity resonators
  • Etching
  • Fabrication
  • Fabrication and characterization
  • Lattices
  • Nanocavities
  • Nanophotonics
  • Optical attenuators
  • Photonic crystals
  • Silicon
  • Silicon compounds

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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