### Abstract

We design and fabricate a high <formula><tex>$Q$</tex></formula> silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic (TM) modes in the 1.55 μm wavelength range. The <formula><tex>$Q$</tex></formula> values obtained for both modes exceed 10<formula><tex>$^{4}$</tex></formula> and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded <formula><tex>$Q$</tex></formula> of more than 10<formula><tex>$^{4}$</tex></formula>. We also found that the presence of a coupled waveguide reduces the intrinsic <formula><tex>$Q$</tex></formula> of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low index PhC nanocavities.

Original language | English |
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Journal | IEEE Photonics Journal |

DOIs | |

Publication status | Accepted/In press - 2017 Sep 19 |

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### Keywords

- Cavity resonators
- Etching
- Fabrication
- Fabrication and characterization
- Lattices
- Nanocavities
- Nanophotonics
- Optical attenuators
- Photonic crystals
- Silicon
- Silicon compounds

### ASJC Scopus subject areas

- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering

### Cite this

*IEEE Photonics Journal*. https://doi.org/10.1109/JPHOT.2017.2754300