Design, Fabrication, and Characterization of a High Q Silica nanobeam Cavity with Orthogonal Resonant Modes

Tomohiro Tetsumoto; Hajime Kumazaki; Kentaro Furusawa; Norihiko Sekine; Takasumi Tanabe

doi:10.1109/JPHOT.2017.2754300

Design, Fabrication, and Characterization of a High Q Silica nanobeam Cavity with Orthogonal Resonant Modes

Tomohiro Tetsumoto, Hajime Kumazaki, Kentaro Furusawa, Norihiko Sekine, Takasumi Tanabe

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

We design and fabricate a high Q silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55 μm wavelength range. The Q values obtained for both modes exceed 104 and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded Q of more than 104. We also found that the presence of a coupled waveguide reduces the intrinsic Q of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities.

Original language	English
Article number	8046146
Journal	IEEE Photonics Journal
Volume	9
Issue number	5
DOIs	https://doi.org/10.1109/JPHOT.2017.2754300
Publication status	Published - 2017 Oct

Keywords

Fabrication and characterization
nanocavities
nanophotonics.
photonic crystals

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/JPHOT.2017.2754300

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title = "Design, Fabrication, and Characterization of a High Q Silica nanobeam Cavity with Orthogonal Resonant Modes",

abstract = "We design and fabricate a high Q silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55 μm wavelength range. The Q values obtained for both modes exceed 104 and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded Q of more than 104. We also found that the presence of a coupled waveguide reduces the intrinsic Q of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities.",

keywords = "Fabrication and characterization, nanocavities, nanophotonics., photonic crystals",

author = "Tomohiro Tetsumoto and Hajime Kumazaki and Kentaro Furusawa and Norihiko Sekine and Takasumi Tanabe",

note = "Funding Information: Manuscript received August 1, 2017; revised September 8, 2017; accepted September 15, 2017. Date of publication September 19, 2017; date of current version October 12, 2017. This work was supported in part by the Strategic Information and Communications R&D Promotion Programme under Grant 152103015 and in part by the JSPS KAKENHI under Grant 16J05171. Corresponding author: Tomohiro Tetsumoto (e-mail: tetsumo@phot.elec.keio.ac.jp). Publisher Copyright: {\textcopyright} 2009-2012 IEEE.",

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doi = "10.1109/JPHOT.2017.2754300",

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AU - Kumazaki, Hajime

AU - Furusawa, Kentaro

AU - Sekine, Norihiko

AU - Tanabe, Takasumi

N1 - Funding Information: Manuscript received August 1, 2017; revised September 8, 2017; accepted September 15, 2017. Date of publication September 19, 2017; date of current version October 12, 2017. This work was supported in part by the Strategic Information and Communications R&D Promotion Programme under Grant 152103015 and in part by the JSPS KAKENHI under Grant 16J05171. Corresponding author: Tomohiro Tetsumoto (e-mail: tetsumo@phot.elec.keio.ac.jp). Publisher Copyright: © 2009-2012 IEEE.

PY - 2017/10

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N2 - We design and fabricate a high Q silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55 μm wavelength range. The Q values obtained for both modes exceed 104 and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded Q of more than 104. We also found that the presence of a coupled waveguide reduces the intrinsic Q of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities.

AB - We design and fabricate a high Q silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55 μm wavelength range. The Q values obtained for both modes exceed 104 and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded Q of more than 104. We also found that the presence of a coupled waveguide reduces the intrinsic Q of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities.

KW - Fabrication and characterization

KW - nanocavities

KW - nanophotonics.

KW - photonic crystals

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Design, Fabrication, and Characterization of a High Q Silica nanobeam Cavity with Orthogonal Resonant Modes

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Keywords

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