Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

Tetsuo Kan, Hidetoshi Takahashi, Nguyen Binh-Khiem, Yuichiro Aoyama, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 μm thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 μm and 140 μm, respectively, with a beam span of 1200 μm and a width of 10-15 μm. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at kx = 1.5 N m-1, ky= 3.5 N m-1 and kz = 0.64 N m-1. We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.

Original languageEnglish
Article number035027
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number3
DOIs
Publication statusPublished - 2013 Mar 1
Externally publishedYes

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Doping (additives)
Thermal diffusion
Force measurement
Sensors
Electric wiring

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Design of a piezoresistive triaxial force sensor probe using the sidewall doping method. / Kan, Tetsuo; Takahashi, Hidetoshi; Binh-Khiem, Nguyen; Aoyama, Yuichiro; Takei, Yusuke; Noda, Kentaro; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Journal of Micromechanics and Microengineering, Vol. 23, No. 3, 035027, 01.03.2013.

Research output: Contribution to journalArticle

Kan, Tetsuo ; Takahashi, Hidetoshi ; Binh-Khiem, Nguyen ; Aoyama, Yuichiro ; Takei, Yusuke ; Noda, Kentaro ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Design of a piezoresistive triaxial force sensor probe using the sidewall doping method. In: Journal of Micromechanics and Microengineering. 2013 ; Vol. 23, No. 3.
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