Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

Tetsuo Kan, Hidetoshi Takahashi, Nguyen Binh-Khiem, Yuichiro Aoyama, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

15 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science