Design of double nozzle type powder jet device optimized for PJD

Toshihiko Shibuya, Mohammad Saeed Sepasy, Koichi Mizutani, Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [I]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

Original languageEnglish
Pages (from-to)398-403
Number of pages6
JournalKey Engineering Materials
Volume389-390
Publication statusPublished - 2009 Jan 1

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Keywords

  • Particle image velocimetry
  • Particle velocity
  • Powder jet deposition

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Shibuya, T., Sepasy, M. S., Mizutani, K., Yoshihara, N., Yan, J., & Kuriyagawa, T. (2009). Design of double nozzle type powder jet device optimized for PJD. Key Engineering Materials, 389-390, 398-403.