標準 CMOS プロセスを用いたマイクロシステム用太陽電池の設計

Translated title of the contribution: Design of solar cell for micro system using standard CMOS process

Daigo Zenibayashi, Takaya Sugiura, Nobuhiko Nakano

Research output: Contribution to journalArticle

Abstract

In recent years, IoT (Internet of Things), which various "things" are connected via the Internet, attracts attention. IoT supports the automation and convenience of various activities by connecting our daily lives. Sensor networks for acquiring information by a huge number of sensor nodes therein is essential for IoT. So, challenges for the realization of this system is the size of the cost and the device. One solution to this problem is the realization of microsystem. In this paper, several methods for improving the performance of on-chip solar cells for microsystem by standard CMOS process are introduced. These are a comb-shape electrode for reducing resistances in semiconductor, reduction of the number of contacts to reduce losses at the substrate/electrode interface and diffusion layers around electrodes for suppressing the recombination velocity at electrodes. These designs improved about 40-78% compared to conventional solar cell design.

Original languageJapanese
Pages (from-to)252-257
Number of pages6
Journalieej transactions on sensors and micromachines
Volume139
Issue number8
DOIs
Publication statusPublished - 2019 Jan 1

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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