Design of vertical type probe tip using finite element analysis

Young Ryun Oh, Yun Jae Kim, Hyun Suk Nam, Ung Gi Park, Hak Joo Lee, Jung Yub Kim, Jun Hyub Park

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 μm(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1̃2 gf(Contact Force) and 100 μμm(Over drive).

Original languageEnglish
Pages (from-to)851-856
Number of pages6
JournalTransactions of the Korean Society of Mechanical Engineers, A
Issue number8
Publication statusPublished - 2012 Aug
Externally publishedYes


  • FE analysis
  • MEMS process
  • Probe test
  • Probe tip

ASJC Scopus subject areas

  • Mechanical Engineering


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