Detection of femtometer deformations of semiconductor devices in operation using an optical lever

Takahisa Mitsui

doi:10.1143/JJAP.47.6563

Detection of femtometer deformations of semiconductor devices in operation using an optical lever

Takahisa Mitsui

School of Medicine

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The operation of an integrated circuit (IC) should cause the thermal expansion of individual semiconductor devices fabricated on the IC. However, the thermal expansion has never been detected due to its smallness. We succeeded in detecting the thermal expansion by using an optical lever and found that its size was 10^-13 m. This technology is suitable for uses an optical IC probe and is a new method for the study of nanodevices.

Original language	English
Pages (from-to)	6563-6565
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	47
Issue number	8 PART 1
DOIs	https://doi.org/10.1143/JJAP.47.6563
Publication status	Published - 2008 Aug 8

Keywords

Integrated circuit
Laser
Nanotechnology
Optical lever
Probe

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.47.6563

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abstract = "The operation of an integrated circuit (IC) should cause the thermal expansion of individual semiconductor devices fabricated on the IC. However, the thermal expansion has never been detected due to its smallness. We succeeded in detecting the thermal expansion by using an optical lever and found that its size was 10-13 m. This technology is suitable for uses an optical IC probe and is a new method for the study of nanodevices.",

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AB - The operation of an integrated circuit (IC) should cause the thermal expansion of individual semiconductor devices fabricated on the IC. However, the thermal expansion has never been detected due to its smallness. We succeeded in detecting the thermal expansion by using an optical lever and found that its size was 10-13 m. This technology is suitable for uses an optical IC probe and is a new method for the study of nanodevices.

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KW - Nanotechnology

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KW - Probe

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Detection of femtometer deformations of semiconductor devices in operation using an optical lever

Abstract

Keywords

ASJC Scopus subject areas

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