Detection principle and verification of non-contact displacement meter with Pico-meter resolution

Hideaki Tamiya, Kayoko Taniguchi, Kazuo Yamazaki, Hideki Aoyama

Research output: Contribution to conferencePaper

Abstract

Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.

Original languageEnglish
DOIs
Publication statusPublished - 2017 Nov 13
Event9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
Duration: 2017 Nov 132017 Nov 17

Other

Other9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
CountryJapan
CityHiroshima City
Period17/11/1317/11/17

Keywords

  • Displacement sensor
  • Grating interferometer
  • Non-contact
  • Pico-meter resolution

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Tamiya, H., Taniguchi, K., Yamazaki, K., & Aoyama, H. (2017). Detection principle and verification of non-contact displacement meter with Pico-meter resolution. Paper presented at 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, Hiroshima City, Japan. https://doi.org/10.1299/jsmelem.2017.9.027