Detection principle and verification of non-contact displacement meter with pico-meter resolution

Hideaki Tamiya, Kayoko Taniguchi, Kazuo Yamazaki, Hideki Aoyama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Displacement sensors based on laser or optical fiber technology are recognized for their capacity for non-contact distance measurement based on reflection from an object, but with limited measurement distance and resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large laser source with stabilized-wavelength . This report presents another solution: a non-contact grating interferometer displacement sensor that enables pico-meter resolution with a semiconductor laser source.

Original languageEnglish
Article numberJAMDSM0107
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume12
Issue number5
DOIs
Publication statusPublished - 2018

Keywords

  • Displacement sensor
  • Grating interferometer
  • Non-contact measurement
  • Pico-meter resolution

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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