Determination of slant angle of p-n interface by multiwavelength near-field photocurrent measurement

T. Saiki, N. Saito, J. Kusano, M. Ohtsu

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Near-field photocurrent measurements with multiwavelength excitation sources are applied to the investigation of a lateral p-n junction grown on patterned GaAs (111)A substrate. In order to probe the internal properties of this device, propagation modes into the sample are utilized retaining high resolution with the contribution of a penetration depth smaller than the aperture diameter. By systematically varying the penetration depth over a wide range up to 900 nm, photocurrent signals due to internal optical response clearly appear. The capability of "tomographic" diagnostics is demonstrated and the slant angle of the p-n interface is determined to be 30±8°.

Original languageEnglish
Pages (from-to)644-646
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number5
DOIs
Publication statusPublished - 1996 Jul 29
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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