Development and realization of a Fl-switching valve in extended-nano space utilizing glass deformation properties at the nanometer scale

Yuriy Pihosh, Yutaka Kazoe, Hitomi Takahashi, Kazuma Mawatari, Kyojiro Morikawa, Takehiko Kitamori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on realization of a fL-switching valve based on an extended-nano channel (ENC) utilizing glass deformation properties. A tiny deformation of glass by the precise actuator control system can lead to an open/closed state of ENC because of its smallness, even if we use a tough glass material. Here we are demonstrating a new concept of a hemispherical valve chamber, its fabrication method, and the valve proof of principle.

Original languageEnglish
Title of host publication21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
PublisherChemical and Biological Microsystems Society
Pages535-536
Number of pages2
ISBN (Electronic)9780692941836
Publication statusPublished - 2020 Jan 1
Externally publishedYes
Event21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 - Savannah, United States
Duration: 2017 Oct 222017 Oct 26

Publication series

Name21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017

Conference

Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
CountryUnited States
CitySavannah
Period17/10/2217/10/26

Keywords

  • Extended-nano fluidics
  • FL-valve
  • Glass made
  • Microchip

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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  • Cite this

    Pihosh, Y., Kazoe, Y., Takahashi, H., Mawatari, K., Morikawa, K., & Kitamori, T. (2020). Development and realization of a Fl-switching valve in extended-nano space utilizing glass deformation properties at the nanometer scale. In 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 (pp. 535-536). (21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017). Chemical and Biological Microsystems Society.