Abstract
We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.
Original language | English |
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Pages (from-to) | 300-306 |
Number of pages | 7 |
Journal | Journal of Low Temperature Physics |
Volume | 183 |
Issue number | 3-4 |
DOIs | |
Publication status | Published - 2016 May 1 |
Keywords
- Magnetization measurement
- SQUID
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Materials Science(all)
- Condensed Matter Physics