Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Daisuke Sakuma; Tomoya Shinozaki; Yusuke Nago; Ryosuke Ishiguro; Satoshi Kashiwaya; Shintaro Nomura; Kimitoshi Kono; Hideaki Takayanagi

doi:10.1007/s10909-016-1556-2

Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Daisuke Sakuma, Tomoya Shinozaki, Yusuke Nago, Ryosuke Ishiguro, Satoshi Kashiwaya, Shintaro Nomura, Kimitoshi Kono, Hideaki Takayanagi

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.

Original language	English
Pages (from-to)	300-306
Number of pages	7
Journal	Journal of Low Temperature Physics
Volume	183
Issue number	3-4
DOIs	https://doi.org/10.1007/s10909-016-1556-2
Publication status	Published - 2016 May 1

Keywords

Magnetization measurement
SQUID

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Materials Science(all)
Condensed Matter Physics

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10.1007/s10909-016-1556-2

Cite this

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title = "Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution",

abstract = "We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.",

keywords = "Magnetization measurement, SQUID",

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doi = "10.1007/s10909-016-1556-2",

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AU - Sakuma, Daisuke

AU - Shinozaki, Tomoya

AU - Nago, Yusuke

AU - Ishiguro, Ryosuke

AU - Kashiwaya, Satoshi

AU - Nomura, Shintaro

AU - Kono, Kimitoshi

AU - Takayanagi, Hideaki

PY - 2016/5/1

Y1 - 2016/5/1

N2 - We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.

AB - We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.

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Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Abstract

Keywords

ASJC Scopus subject areas

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