Development of a Two-Dimensional Micro-SQUID Array for Investigation of Magnetization Spatial Distribution

Daisuke Sakuma, Tomoya Shinozaki, Yusuke Nago, Ryosuke Ishiguro, Satoshi Kashiwaya, Shintaro Nomura, Kimitoshi Kono, Hideaki Takayanagi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We developed a two-dimensional array of superconducting quantum interference devices (SQUIDs) for investigation of fine spatial distribution of magnetization in superconducting Sr (Formula presented.) RuO (Formula presented.). Micrometer-sized SQUIDs based on homogeneously formed Al/AlO (Formula presented.) /Al tunnel-type Josephson junctions were fabricated using shadow evaporation technique. Unnecessary electrodes formed by the shadow evaporation were removed by inductively coupled plasma reactive ion etching, in order to realize a dense array of SQUIDs. We measured the magnetic modulation of the maximum Josephson current of each SQUID in the array and evaluated the interaction among the SQUIDs.

Original languageEnglish
Pages (from-to)300-306
Number of pages7
JournalJournal of Low Temperature Physics
Volume183
Issue number3-4
DOIs
Publication statusPublished - 2016 May 1

Keywords

  • Magnetization measurement
  • SQUID

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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