Development of aerostatically lubricated table system.

I. Inasaki, Tojiro Aoyama, G. Iba

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

An aerostatically lubricated table system, which is free from oil contamination, was developed to enable ultraprecise movements. Including the read screw system, all relative sliding parts of the table system are aerostatically lubricated. Static stiffness of the table system and accuracy of the table movement are experimentally investigated. The measured static stiffness of the table system is 8 N/MUm in the feed direction, and 160 N/MUm in the vertical direction. Positioning error of the table, which was measured with a laser interferometer, does not exceed 70 nm. Because of the extremely low frictional resistance of the aerostatically lubricated elements the movement of the table system is completely free from backlash. Consequently, it was confirmed that the aerostatically lubricated table system developed was capable of achieving very smooth and accurate movements. (from authors' abstract)

Original languageEnglish
Title of host publicationIN
Subtitle of host publicationEUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985)
PublisherElsevier Sci.Publishers B.V
VolumeIII, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9
ISBN (Print)0444995528, 9780444995520
Publication statusPublished - 1985 Jan 1
Externally publishedYes

Fingerprint

Stiffness
Interferometers
Contamination
Lasers
Oils

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Inasaki, I., Aoyama, T., & Iba, G. (1985). Development of aerostatically lubricated table system. In IN: EUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985) (Vol. III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9). Elsevier Sci.Publishers B.V.

Development of aerostatically lubricated table system. / Inasaki, I.; Aoyama, Tojiro; Iba, G.

IN: EUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985). Vol. III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9 Elsevier Sci.Publishers B.V, 1985.

Research output: Chapter in Book/Report/Conference proceedingChapter

Inasaki, I, Aoyama, T & Iba, G 1985, Development of aerostatically lubricated table system. in IN: EUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985). vol. III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9, Elsevier Sci.Publishers B.V.
Inasaki I, Aoyama T, Iba G. Development of aerostatically lubricated table system. In IN: EUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985). Vol. III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9. Elsevier Sci.Publishers B.V. 1985
Inasaki, I. ; Aoyama, Tojiro ; Iba, G. / Development of aerostatically lubricated table system. IN: EUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985). Vol. III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9 Elsevier Sci.Publishers B.V, 1985.
@inbook{bed28fa6923d418b96c244ef3879e7e1,
title = "Development of aerostatically lubricated table system.",
abstract = "An aerostatically lubricated table system, which is free from oil contamination, was developed to enable ultraprecise movements. Including the read screw system, all relative sliding parts of the table system are aerostatically lubricated. Static stiffness of the table system and accuracy of the table movement are experimentally investigated. The measured static stiffness of the table system is 8 N/MUm in the feed direction, and 160 N/MUm in the vertical direction. Positioning error of the table, which was measured with a laser interferometer, does not exceed 70 nm. Because of the extremely low frictional resistance of the aerostatically lubricated elements the movement of the table system is completely free from backlash. Consequently, it was confirmed that the aerostatically lubricated table system developed was capable of achieving very smooth and accurate movements. (from authors' abstract)",
author = "I. Inasaki and Tojiro Aoyama and G. Iba",
year = "1985",
month = "1",
day = "1",
language = "English",
isbn = "0444995528",
volume = "III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9",
booktitle = "IN",
publisher = "Elsevier Sci.Publishers B.V",

}

TY - CHAP

T1 - Development of aerostatically lubricated table system.

AU - Inasaki, I.

AU - Aoyama, Tojiro

AU - Iba, G.

PY - 1985/1/1

Y1 - 1985/1/1

N2 - An aerostatically lubricated table system, which is free from oil contamination, was developed to enable ultraprecise movements. Including the read screw system, all relative sliding parts of the table system are aerostatically lubricated. Static stiffness of the table system and accuracy of the table movement are experimentally investigated. The measured static stiffness of the table system is 8 N/MUm in the feed direction, and 160 N/MUm in the vertical direction. Positioning error of the table, which was measured with a laser interferometer, does not exceed 70 nm. Because of the extremely low frictional resistance of the aerostatically lubricated elements the movement of the table system is completely free from backlash. Consequently, it was confirmed that the aerostatically lubricated table system developed was capable of achieving very smooth and accurate movements. (from authors' abstract)

AB - An aerostatically lubricated table system, which is free from oil contamination, was developed to enable ultraprecise movements. Including the read screw system, all relative sliding parts of the table system are aerostatically lubricated. Static stiffness of the table system and accuracy of the table movement are experimentally investigated. The measured static stiffness of the table system is 8 N/MUm in the feed direction, and 160 N/MUm in the vertical direction. Positioning error of the table, which was measured with a laser interferometer, does not exceed 70 nm. Because of the extremely low frictional resistance of the aerostatically lubricated elements the movement of the table system is completely free from backlash. Consequently, it was confirmed that the aerostatically lubricated table system developed was capable of achieving very smooth and accurate movements. (from authors' abstract)

UR - http://www.scopus.com/inward/record.url?scp=85040873150&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85040873150&partnerID=8YFLogxK

M3 - Chapter

AN - SCOPUS:85040873150

SN - 0444995528

SN - 9780444995520

VL - III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9

BT - IN

PB - Elsevier Sci.Publishers B.V

ER -