Abstract
An aerostatically lubricated table system, which is free from oil contamination, was developed to enable ultraprecise movements. Including the read screw system, all relative sliding parts of the table system are aerostatically lubricated. Static stiffness of the table system and accuracy of the table movement are experimentally investigated. The measured static stiffness of the table system is 8 N/MUm in the feed direction, and 160 N/MUm in the vertical direction. Positioning error of the table, which was measured with a laser interferometer, does not exceed 70 nm. Because of the extremely low frictional resistance of the aerostatically lubricated elements the movement of the table system is completely free from backlash. Consequently, it was confirmed that the aerostatically lubricated table system developed was capable of achieving very smooth and accurate movements. (from authors' abstract)
| Original language | English |
|---|---|
| Title of host publication | IN |
| Subtitle of host publication | EUROTRIB 85, 4TH EUROPEAN TRIBOLOGY CONGRESS, (ECULLY, FRANCE: SEP. 9-12, 1985) |
| Publisher | Elsevier Sci.Publishers B.V |
| Volume | III, Amsterdam, The Netherlands, Elsevier Sci. Publishers B.V., 1985, Section 2-2, 5p. (ISBN 0-444-9 |
| ISBN (Print) | 0444995528, 9780444995520 |
| Publication status | Published - 1985 Jan 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)