Development of cluster ion source based on modulated pulse power magnetron sputtering technique

C. H. Zhang, H. Tsunoyama, H. Akatsuka, H. Sekiya, T. Nagase, A. Nakajima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new ion source based on modulated pulse power (MPP) magnetron sputtering (MSP) was developed and demonstrated for cluster production. By employing MPP-MSP, both silver and silicon cluster beams were produced and analyzed by a quadrupole mass spectrometer. It is found that the maximum intensity of silver cluster anions reaches 500 pA, which is considerably higher than that with a conventional DC-MSP. For silicon cluster cation, the overall ion intensity of the cluster beam by MPP-MSP is about three times higher than that generated by DC-MSP.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages428-431
Number of pages4
DOIs
Publication statusPublished - 2013 Sep 2
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: 2013 Apr 72013 Apr 10

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CountryChina
CitySuzhou
Period13/4/713/4/10

Keywords

  • cluster source
  • high power impulse magnetron sputtering
  • mass spectroscopy
  • modulated pulse power

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

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  • Cite this

    Zhang, C. H., Tsunoyama, H., Akatsuka, H., Sekiya, H., Nagase, T., & Nakajima, A. (2013). Development of cluster ion source based on modulated pulse power magnetron sputtering technique. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 428-431). [6559764] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559764