Development of electrolyte-based capacitive level sensor

Hideki Morinaga, Yoshinori Matsumoto

Research output: Contribution to journalArticle

Abstract

In this study, electrolyte-based level sensor has been fabricated on printed circuit board and evaluated with charge balanced C-V converter fabricated by 0.357mu;m CMOS process. Sector pattern sensor electrodes were fabricated and polydimethylsiloxane was used as package material. Propylene carbonate was injected in the bumpy surface sensor cavity of 10mm diameter and 2mm height, output voltage was changed with the inclination angle without the effect of vibration.

Original languageEnglish
Pages (from-to)469-470
Number of pages2
Journalieej transactions on sensors and micromachines
Volume129
Issue number12
DOIs
Publication statusPublished - 2009 Dec 1

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Keywords

  • Charge balanced c-v converter
  • Level sensor
  • Polydimethylsiloxane
  • Propylene carbonate

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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